5/15/2011	12:57:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	12:57:34 AM	Recipe started at 12:57 AM
5/15/2011	12:57:34 AM	Helium valve closed
5/15/2011	12:57:34 AM	H2 valve closed
5/15/2011	12:57:34 AM	BCl3 valve closed
5/15/2011	12:57:34 AM	PH3 valve closed
5/15/2011	12:57:34 AM	SiCl4 pre valve closed
5/15/2011	12:57:34 AM	SiCl4 post valve closed
5/15/2011	12:57:34 AM	Main Vac valve closed
5/15/2011	12:57:34 AM	Bubbler valve closed
5/15/2011	12:57:34 AM	Bypass valve opened
5/15/2011	12:57:34 AM	Helium MFC set to  0.000000
5/15/2011	12:57:34 AM	H2 MFC set to  0.000000
5/15/2011	12:57:34 AM	BCl3 MFC set to  0.000000
5/15/2011	12:57:34 AM	PHl3 MFC set to  0.000000
5/15/2011	12:57:34 AM	SiCl4 MFC set to  0.000000
5/15/2011	12:57:34 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	12:57:35 AM	Tube furnace set to 0
5/15/2011	12:57:35 AM	Helium valve closed
5/15/2011	12:57:35 AM	H2 valve closed
5/15/2011	12:57:35 AM	BCl3 valve closed
5/15/2011	12:57:35 AM	PH3 valve closed
5/15/2011	12:57:35 AM	SiCl4 pre valve closed
5/15/2011	12:57:35 AM	SiCl4 post valve closed
5/15/2011	12:57:35 AM	Bubbler valve closed
5/15/2011	12:57:35 AM	Main Vac valve opened
5/15/2011	12:57:35 AM	Bypass valve opened
5/15/2011	12:57:35 AM	Helium MFC set to  0.000000
5/15/2011	12:57:35 AM	H2 MFC set to  0.000000
5/15/2011	12:57:35 AM	BCl3 MFC set to  0.000000
5/15/2011	12:57:35 AM	PHl3 MFC set to  0.000000
5/15/2011	12:57:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	12:57:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	12:57:35 AM	Tube furnace set to 0
5/15/2011	12:58:35 AM	H2 valve closed
5/15/2011	12:58:35 AM	BCl3 valve closed
5/15/2011	12:58:35 AM	PH3 valve closed
5/15/2011	12:58:35 AM	SiCl4 pre valve closed
5/15/2011	12:58:35 AM	SiCl4 post valve closed
5/15/2011	12:58:35 AM	Bubbler valve closed
5/15/2011	12:58:35 AM	Helium valve opened
5/15/2011	12:58:35 AM	Main Vac valve opened
5/15/2011	12:58:35 AM	Bypass valve opened
5/15/2011	12:58:35 AM	Helium MFC set to  100.000000
5/15/2011	12:58:35 AM	H2 MFC set to  0.000000
5/15/2011	12:58:35 AM	BCl3 MFC set to  0.000000
5/15/2011	12:58:35 AM	PHl3 MFC set to  0.000000
5/15/2011	12:58:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	12:58:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	12:58:35 AM	Tube furnace set to 0
5/15/2011	12:59:35 AM	Helium valve closed
5/15/2011	12:59:35 AM	H2 valve closed
5/15/2011	12:59:35 AM	BCl3 valve closed
5/15/2011	12:59:35 AM	PH3 valve closed
5/15/2011	12:59:35 AM	SiCl4 pre valve closed
5/15/2011	12:59:35 AM	SiCl4 post valve closed
5/15/2011	12:59:35 AM	Bubbler valve closed
5/15/2011	12:59:35 AM	Main Vac valve opened
5/15/2011	12:59:35 AM	Bypass valve opened
5/15/2011	12:59:35 AM	Helium MFC set to  0.000000
5/15/2011	12:59:35 AM	H2 MFC set to  0.000000
5/15/2011	12:59:35 AM	BCl3 MFC set to  0.000000
5/15/2011	12:59:35 AM	PHl3 MFC set to  0.000000
5/15/2011	12:59:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	12:59:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	12:59:36 AM	Tube furnace set to 0
5/15/2011	1:00:36 AM	H2 valve closed
5/15/2011	1:00:36 AM	BCl3 valve closed
5/15/2011	1:00:36 AM	PH3 valve closed
5/15/2011	1:00:36 AM	SiCl4 pre valve closed
5/15/2011	1:00:36 AM	SiCl4 post valve closed
5/15/2011	1:00:36 AM	Bubbler valve closed
5/15/2011	1:00:36 AM	Helium valve opened
5/15/2011	1:00:36 AM	Main Vac valve opened
5/15/2011	1:00:36 AM	Bypass valve opened
5/15/2011	1:00:36 AM	Helium MFC set to  100.000000
5/15/2011	1:00:36 AM	H2 MFC set to  0.000000
5/15/2011	1:00:36 AM	BCl3 MFC set to  0.000000
5/15/2011	1:00:36 AM	PHl3 MFC set to  0.000000
5/15/2011	1:00:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:00:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:00:36 AM	Tube furnace set to 0
5/15/2011	1:01:36 AM	Helium valve closed
5/15/2011	1:01:36 AM	H2 valve closed
5/15/2011	1:01:36 AM	BCl3 valve closed
5/15/2011	1:01:36 AM	PH3 valve closed
5/15/2011	1:01:36 AM	SiCl4 pre valve closed
5/15/2011	1:01:36 AM	SiCl4 post valve closed
5/15/2011	1:01:36 AM	Bubbler valve closed
5/15/2011	1:01:36 AM	Main Vac valve opened
5/15/2011	1:01:36 AM	Bypass valve opened
5/15/2011	1:01:36 AM	Helium MFC set to  0.000000
5/15/2011	1:01:36 AM	H2 MFC set to  0.000000
5/15/2011	1:01:36 AM	BCl3 MFC set to  0.000000
5/15/2011	1:01:36 AM	PHl3 MFC set to  0.000000
5/15/2011	1:01:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:01:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:01:36 AM	Tube furnace set to 0
5/15/2011	1:02:36 AM	H2 valve closed
5/15/2011	1:02:36 AM	BCl3 valve closed
5/15/2011	1:02:36 AM	PH3 valve closed
5/15/2011	1:02:36 AM	SiCl4 pre valve closed
5/15/2011	1:02:36 AM	SiCl4 post valve closed
5/15/2011	1:02:36 AM	Bubbler valve closed
5/15/2011	1:02:36 AM	Helium valve opened
5/15/2011	1:02:36 AM	Main Vac valve opened
5/15/2011	1:02:36 AM	Bypass valve opened
5/15/2011	1:02:36 AM	Helium MFC set to  100.000000
5/15/2011	1:02:36 AM	H2 MFC set to  0.000000
5/15/2011	1:02:36 AM	BCl3 MFC set to  0.000000
5/15/2011	1:02:36 AM	PHl3 MFC set to  0.000000
5/15/2011	1:02:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:02:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:02:36 AM	Tube furnace set to 0
5/15/2011	1:03:36 AM	Helium valve closed
5/15/2011	1:03:36 AM	H2 valve closed
5/15/2011	1:03:36 AM	BCl3 valve closed
5/15/2011	1:03:36 AM	PH3 valve closed
5/15/2011	1:03:36 AM	SiCl4 pre valve closed
5/15/2011	1:03:36 AM	SiCl4 post valve closed
5/15/2011	1:03:36 AM	Bubbler valve closed
5/15/2011	1:03:36 AM	Main Vac valve opened
5/15/2011	1:03:36 AM	Bypass valve opened
5/15/2011	1:03:36 AM	Helium MFC set to  0.000000
5/15/2011	1:03:36 AM	H2 MFC set to  0.000000
5/15/2011	1:03:36 AM	BCl3 MFC set to  0.000000
5/15/2011	1:03:36 AM	PHl3 MFC set to  0.000000
5/15/2011	1:03:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:03:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:03:36 AM	Tube furnace set to 0
5/15/2011	1:04:36 AM	H2 valve closed
5/15/2011	1:04:36 AM	BCl3 valve closed
5/15/2011	1:04:36 AM	PH3 valve closed
5/15/2011	1:04:36 AM	SiCl4 pre valve closed
5/15/2011	1:04:36 AM	SiCl4 post valve closed
5/15/2011	1:04:36 AM	Bubbler valve closed
5/15/2011	1:04:36 AM	Helium valve opened
5/15/2011	1:04:36 AM	Main Vac valve opened
5/15/2011	1:04:36 AM	Bypass valve opened
5/15/2011	1:04:36 AM	Helium MFC set to  100.000000
5/15/2011	1:04:36 AM	H2 MFC set to  0.000000
5/15/2011	1:04:36 AM	BCl3 MFC set to  0.000000
5/15/2011	1:04:36 AM	PHl3 MFC set to  0.000000
5/15/2011	1:04:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:04:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:04:37 AM	Tube furnace set to 0
5/15/2011	1:05:37 AM	Helium valve closed
5/15/2011	1:05:37 AM	H2 valve closed
5/15/2011	1:05:37 AM	BCl3 valve closed
5/15/2011	1:05:37 AM	PH3 valve closed
5/15/2011	1:05:37 AM	SiCl4 pre valve closed
5/15/2011	1:05:37 AM	SiCl4 post valve closed
5/15/2011	1:05:37 AM	Bubbler valve closed
5/15/2011	1:05:37 AM	Main Vac valve opened
5/15/2011	1:05:37 AM	Bypass valve opened
5/15/2011	1:05:37 AM	Helium MFC set to  0.000000
5/15/2011	1:05:37 AM	H2 MFC set to  0.000000
5/15/2011	1:05:37 AM	BCl3 MFC set to  0.000000
5/15/2011	1:05:37 AM	PHl3 MFC set to  0.000000
5/15/2011	1:05:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:05:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:05:37 AM	Tube furnace set to 0
5/15/2011	1:06:37 AM	H2 valve closed
5/15/2011	1:06:37 AM	BCl3 valve closed
5/15/2011	1:06:37 AM	PH3 valve closed
5/15/2011	1:06:37 AM	SiCl4 pre valve closed
5/15/2011	1:06:37 AM	SiCl4 post valve closed
5/15/2011	1:06:37 AM	Bubbler valve closed
5/15/2011	1:06:37 AM	Helium valve opened
5/15/2011	1:06:37 AM	Main Vac valve opened
5/15/2011	1:06:37 AM	Bypass valve opened
5/15/2011	1:06:37 AM	Helium MFC set to  100.000000
5/15/2011	1:06:37 AM	H2 MFC set to  0.000000
5/15/2011	1:06:37 AM	BCl3 MFC set to  0.000000
5/15/2011	1:06:37 AM	PHl3 MFC set to  0.000000
5/15/2011	1:06:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:06:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:06:37 AM	Tube furnace set to 0
5/15/2011	1:07:37 AM	Helium valve closed
5/15/2011	1:07:37 AM	H2 valve closed
5/15/2011	1:07:37 AM	BCl3 valve closed
5/15/2011	1:07:37 AM	PH3 valve closed
5/15/2011	1:07:37 AM	SiCl4 pre valve closed
5/15/2011	1:07:37 AM	SiCl4 post valve closed
5/15/2011	1:07:37 AM	Bubbler valve closed
5/15/2011	1:07:37 AM	Main Vac valve opened
5/15/2011	1:07:37 AM	Bypass valve opened
5/15/2011	1:07:37 AM	Helium MFC set to  0.000000
5/15/2011	1:07:37 AM	H2 MFC set to  0.000000
5/15/2011	1:07:37 AM	BCl3 MFC set to  0.000000
5/15/2011	1:07:37 AM	PHl3 MFC set to  0.000000
5/15/2011	1:07:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:07:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:07:37 AM	Tube furnace set to 0
5/15/2011	1:08:37 AM	H2 valve closed
5/15/2011	1:08:37 AM	BCl3 valve closed
5/15/2011	1:08:37 AM	PH3 valve closed
5/15/2011	1:08:37 AM	SiCl4 pre valve closed
5/15/2011	1:08:37 AM	SiCl4 post valve closed
5/15/2011	1:08:37 AM	Bubbler valve closed
5/15/2011	1:08:37 AM	Helium valve opened
5/15/2011	1:08:37 AM	Main Vac valve opened
5/15/2011	1:08:37 AM	Bypass valve opened
5/15/2011	1:08:37 AM	Helium MFC set to  100.000000
5/15/2011	1:08:37 AM	H2 MFC set to  0.000000
5/15/2011	1:08:37 AM	BCl3 MFC set to  0.000000
5/15/2011	1:08:37 AM	PHl3 MFC set to  0.000000
5/15/2011	1:08:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:08:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:08:37 AM	Tube furnace set to 0
5/15/2011	1:09:37 AM	Helium valve closed
5/15/2011	1:09:37 AM	H2 valve closed
5/15/2011	1:09:37 AM	BCl3 valve closed
5/15/2011	1:09:37 AM	PH3 valve closed
5/15/2011	1:09:37 AM	SiCl4 pre valve closed
5/15/2011	1:09:37 AM	SiCl4 post valve closed
5/15/2011	1:09:37 AM	Bubbler valve closed
5/15/2011	1:09:37 AM	Main Vac valve opened
5/15/2011	1:09:38 AM	Bypass valve opened
5/15/2011	1:09:38 AM	Helium MFC set to  0.000000
5/15/2011	1:09:38 AM	H2 MFC set to  0.000000
5/15/2011	1:09:38 AM	BCl3 MFC set to  0.000000
5/15/2011	1:09:38 AM	PHl3 MFC set to  0.000000
5/15/2011	1:09:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:09:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:09:38 AM	Tube furnace set to 0
5/15/2011	1:10:38 AM	H2 valve closed
5/15/2011	1:10:38 AM	BCl3 valve closed
5/15/2011	1:10:38 AM	PH3 valve closed
5/15/2011	1:10:38 AM	SiCl4 pre valve closed
5/15/2011	1:10:38 AM	SiCl4 post valve closed
5/15/2011	1:10:38 AM	Bubbler valve closed
5/15/2011	1:10:38 AM	Helium valve opened
5/15/2011	1:10:38 AM	Main Vac valve opened
5/15/2011	1:10:38 AM	Bypass valve opened
5/15/2011	1:10:38 AM	Helium MFC set to  100.000000
5/15/2011	1:10:38 AM	H2 MFC set to  0.000000
5/15/2011	1:10:38 AM	BCl3 MFC set to  0.000000
5/15/2011	1:10:38 AM	PHl3 MFC set to  0.000000
5/15/2011	1:10:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:10:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:10:38 AM	Tube furnace set to 0
5/15/2011	1:11:38 AM	Helium valve closed
5/15/2011	1:11:38 AM	H2 valve closed
5/15/2011	1:11:38 AM	BCl3 valve closed
5/15/2011	1:11:38 AM	PH3 valve closed
5/15/2011	1:11:38 AM	SiCl4 pre valve closed
5/15/2011	1:11:38 AM	SiCl4 post valve closed
5/15/2011	1:11:38 AM	Bubbler valve closed
5/15/2011	1:11:38 AM	Main Vac valve opened
5/15/2011	1:11:38 AM	Bypass valve opened
5/15/2011	1:11:38 AM	Helium MFC set to  0.000000
5/15/2011	1:11:38 AM	H2 MFC set to  0.000000
5/15/2011	1:11:38 AM	BCl3 MFC set to  0.000000
5/15/2011	1:11:38 AM	PHl3 MFC set to  0.000000
5/15/2011	1:11:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:11:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:11:38 AM	Tube furnace set to 0
5/15/2011	1:12:38 AM	H2 valve closed
5/15/2011	1:12:38 AM	BCl3 valve closed
5/15/2011	1:12:38 AM	PH3 valve closed
5/15/2011	1:12:38 AM	SiCl4 pre valve closed
5/15/2011	1:12:38 AM	SiCl4 post valve closed
5/15/2011	1:12:38 AM	Bubbler valve closed
5/15/2011	1:12:38 AM	Helium valve opened
5/15/2011	1:12:38 AM	Main Vac valve opened
5/15/2011	1:12:38 AM	Bypass valve opened
5/15/2011	1:12:38 AM	Helium MFC set to  100.000000
5/15/2011	1:12:38 AM	H2 MFC set to  0.000000
5/15/2011	1:12:38 AM	BCl3 MFC set to  0.000000
5/15/2011	1:12:38 AM	PHl3 MFC set to  0.000000
5/15/2011	1:12:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:12:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:12:38 AM	Tube furnace set to 0
5/15/2011	1:13:38 AM	Helium valve closed
5/15/2011	1:13:38 AM	H2 valve closed
5/15/2011	1:13:38 AM	BCl3 valve closed
5/15/2011	1:13:38 AM	PH3 valve closed
5/15/2011	1:13:38 AM	SiCl4 pre valve closed
5/15/2011	1:13:38 AM	SiCl4 post valve closed
5/15/2011	1:13:38 AM	Bubbler valve closed
5/15/2011	1:13:38 AM	Main Vac valve opened
5/15/2011	1:13:38 AM	Bypass valve opened
5/15/2011	1:13:38 AM	Helium MFC set to  0.000000
5/15/2011	1:13:38 AM	H2 MFC set to  0.000000
5/15/2011	1:13:38 AM	BCl3 MFC set to  0.000000
5/15/2011	1:13:38 AM	PHl3 MFC set to  0.000000
5/15/2011	1:13:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:13:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:13:38 AM	Tube furnace set to 0
5/15/2011	1:14:38 AM	H2 valve closed
5/15/2011	1:14:38 AM	BCl3 valve closed
5/15/2011	1:14:39 AM	PH3 valve closed
5/15/2011	1:14:39 AM	SiCl4 pre valve closed
5/15/2011	1:14:39 AM	SiCl4 post valve closed
5/15/2011	1:14:39 AM	Bubbler valve closed
5/15/2011	1:14:39 AM	Helium valve opened
5/15/2011	1:14:39 AM	Main Vac valve opened
5/15/2011	1:14:39 AM	Bypass valve opened
5/15/2011	1:14:39 AM	Helium MFC set to  100.000000
5/15/2011	1:14:39 AM	H2 MFC set to  0.000000
5/15/2011	1:14:39 AM	BCl3 MFC set to  0.000000
5/15/2011	1:14:39 AM	PHl3 MFC set to  0.000000
5/15/2011	1:14:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:14:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:14:39 AM	Tube furnace set to 0
5/15/2011	1:15:39 AM	Helium valve closed
5/15/2011	1:15:39 AM	H2 valve closed
5/15/2011	1:15:39 AM	BCl3 valve closed
5/15/2011	1:15:39 AM	PH3 valve closed
5/15/2011	1:15:39 AM	SiCl4 pre valve closed
5/15/2011	1:15:39 AM	SiCl4 post valve closed
5/15/2011	1:15:39 AM	Bubbler valve closed
5/15/2011	1:15:39 AM	Main Vac valve opened
5/15/2011	1:15:39 AM	Bypass valve opened
5/15/2011	1:15:39 AM	Helium MFC set to  0.000000
5/15/2011	1:15:39 AM	H2 MFC set to  0.000000
5/15/2011	1:15:39 AM	BCl3 MFC set to  0.000000
5/15/2011	1:15:39 AM	PHl3 MFC set to  0.000000
5/15/2011	1:15:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:15:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:15:39 AM	Tube furnace set to 0
5/15/2011	1:16:39 AM	H2 valve closed
5/15/2011	1:16:39 AM	BCl3 valve closed
5/15/2011	1:16:39 AM	PH3 valve closed
5/15/2011	1:16:39 AM	SiCl4 pre valve closed
5/15/2011	1:16:39 AM	SiCl4 post valve closed
5/15/2011	1:16:39 AM	Bubbler valve closed
5/15/2011	1:16:39 AM	Helium valve opened
5/15/2011	1:16:39 AM	Main Vac valve opened
5/15/2011	1:16:39 AM	Bypass valve opened
5/15/2011	1:16:39 AM	Helium MFC set to  100.000000
5/15/2011	1:16:39 AM	H2 MFC set to  0.000000
5/15/2011	1:16:39 AM	BCl3 MFC set to  0.000000
5/15/2011	1:16:39 AM	PHl3 MFC set to  0.000000
5/15/2011	1:16:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:16:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:16:39 AM	Tube furnace set to 0
5/15/2011	1:17:39 AM	Helium valve closed
5/15/2011	1:17:39 AM	H2 valve closed
5/15/2011	1:17:39 AM	BCl3 valve closed
5/15/2011	1:17:39 AM	PH3 valve closed
5/15/2011	1:17:39 AM	SiCl4 pre valve closed
5/15/2011	1:17:39 AM	SiCl4 post valve closed
5/15/2011	1:17:39 AM	Bubbler valve closed
5/15/2011	1:17:39 AM	Main Vac valve opened
5/15/2011	1:17:39 AM	Bypass valve opened
5/15/2011	1:17:39 AM	Helium MFC set to  0.000000
5/15/2011	1:17:39 AM	H2 MFC set to  0.000000
5/15/2011	1:17:39 AM	BCl3 MFC set to  0.000000
5/15/2011	1:17:39 AM	PHl3 MFC set to  0.000000
5/15/2011	1:17:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:17:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:17:39 AM	Tube furnace set to 0
5/15/2011	1:17:40 AM	Run finished at 1:17 AM
5/15/2011	1:17:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	1:18:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	1:19:01 AM	Recipe started at 1:18 AM
5/15/2011	1:19:01 AM	Helium valve closed
5/15/2011	1:19:01 AM	H2 valve closed
5/15/2011	1:19:01 AM	BCl3 valve closed
5/15/2011	1:19:01 AM	PH3 valve closed
5/15/2011	1:19:01 AM	SiCl4 pre valve closed
5/15/2011	1:19:01 AM	SiCl4 post valve closed
5/15/2011	1:19:01 AM	Main Vac valve closed
5/15/2011	1:19:01 AM	Bubbler valve closed
5/15/2011	1:19:01 AM	Bypass valve opened
5/15/2011	1:19:01 AM	Helium MFC set to  0.000000
5/15/2011	1:19:01 AM	H2 MFC set to  0.000000
5/15/2011	1:19:01 AM	BCl3 MFC set to  0.000000
5/15/2011	1:19:01 AM	PHl3 MFC set to  0.000000
5/15/2011	1:19:01 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:19:01 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:19:01 AM	Tube furnace set to 0
5/15/2011	1:19:01 AM	Helium valve closed
5/15/2011	1:19:01 AM	H2 valve closed
5/15/2011	1:19:01 AM	BCl3 valve closed
5/15/2011	1:19:01 AM	PH3 valve closed
5/15/2011	1:19:01 AM	SiCl4 pre valve closed
5/15/2011	1:19:01 AM	SiCl4 post valve closed
5/15/2011	1:19:01 AM	Bubbler valve closed
5/15/2011	1:19:01 AM	Main Vac valve opened
5/15/2011	1:19:01 AM	Bypass valve opened
5/15/2011	1:19:01 AM	Helium MFC set to  0.000000
5/15/2011	1:19:01 AM	H2 MFC set to  0.000000
5/15/2011	1:19:01 AM	BCl3 MFC set to  0.000000
5/15/2011	1:19:01 AM	PHl3 MFC set to  0.000000
5/15/2011	1:19:01 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:19:01 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:19:02 AM	Tube furnace set to 0
5/15/2011	1:20:02 AM	H2 valve closed
5/15/2011	1:20:02 AM	BCl3 valve closed
5/15/2011	1:20:02 AM	PH3 valve closed
5/15/2011	1:20:02 AM	SiCl4 pre valve closed
5/15/2011	1:20:02 AM	SiCl4 post valve closed
5/15/2011	1:20:02 AM	Bubbler valve closed
5/15/2011	1:20:02 AM	Helium valve opened
5/15/2011	1:20:02 AM	Main Vac valve opened
5/15/2011	1:20:02 AM	Bypass valve opened
5/15/2011	1:20:02 AM	Helium MFC set to  100.000000
5/15/2011	1:20:02 AM	H2 MFC set to  0.000000
5/15/2011	1:20:02 AM	BCl3 MFC set to  0.000000
5/15/2011	1:20:02 AM	PHl3 MFC set to  0.000000
5/15/2011	1:20:02 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:20:02 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:20:02 AM	Tube furnace set to 0
5/15/2011	1:21:02 AM	Helium valve closed
5/15/2011	1:21:02 AM	H2 valve closed
5/15/2011	1:21:02 AM	BCl3 valve closed
5/15/2011	1:21:02 AM	PH3 valve closed
5/15/2011	1:21:02 AM	SiCl4 pre valve closed
5/15/2011	1:21:02 AM	SiCl4 post valve closed
5/15/2011	1:21:02 AM	Bubbler valve closed
5/15/2011	1:21:02 AM	Main Vac valve opened
5/15/2011	1:21:02 AM	Bypass valve opened
5/15/2011	1:21:02 AM	Helium MFC set to  0.000000
5/15/2011	1:21:02 AM	H2 MFC set to  0.000000
5/15/2011	1:21:02 AM	BCl3 MFC set to  0.000000
5/15/2011	1:21:02 AM	PHl3 MFC set to  0.000000
5/15/2011	1:21:02 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:21:02 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:21:02 AM	Tube furnace set to 0
5/15/2011	1:22:02 AM	H2 valve closed
5/15/2011	1:22:02 AM	BCl3 valve closed
5/15/2011	1:22:02 AM	PH3 valve closed
5/15/2011	1:22:02 AM	SiCl4 pre valve closed
5/15/2011	1:22:02 AM	SiCl4 post valve closed
5/15/2011	1:22:02 AM	Bubbler valve closed
5/15/2011	1:22:02 AM	Helium valve opened
5/15/2011	1:22:02 AM	Main Vac valve opened
5/15/2011	1:22:02 AM	Bypass valve opened
5/15/2011	1:22:02 AM	Helium MFC set to  100.000000
5/15/2011	1:22:02 AM	H2 MFC set to  0.000000
5/15/2011	1:22:02 AM	BCl3 MFC set to  0.000000
5/15/2011	1:22:02 AM	PHl3 MFC set to  0.000000
5/15/2011	1:22:02 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:22:02 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:22:02 AM	Tube furnace set to 0
5/15/2011	1:23:02 AM	Helium valve closed
5/15/2011	1:23:02 AM	H2 valve closed
5/15/2011	1:23:02 AM	BCl3 valve closed
5/15/2011	1:23:02 AM	PH3 valve closed
5/15/2011	1:23:02 AM	SiCl4 pre valve closed
5/15/2011	1:23:02 AM	SiCl4 post valve closed
5/15/2011	1:23:02 AM	Bubbler valve closed
5/15/2011	1:23:02 AM	Main Vac valve opened
5/15/2011	1:23:02 AM	Bypass valve opened
5/15/2011	1:23:02 AM	Helium MFC set to  0.000000
5/15/2011	1:23:02 AM	H2 MFC set to  0.000000
5/15/2011	1:23:02 AM	BCl3 MFC set to  0.000000
5/15/2011	1:23:02 AM	PHl3 MFC set to  0.000000
5/15/2011	1:23:02 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:23:02 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:23:02 AM	Tube furnace set to 0
5/15/2011	1:24:02 AM	H2 valve closed
5/15/2011	1:24:02 AM	BCl3 valve closed
5/15/2011	1:24:02 AM	PH3 valve closed
5/15/2011	1:24:02 AM	SiCl4 pre valve closed
5/15/2011	1:24:02 AM	SiCl4 post valve closed
5/15/2011	1:24:02 AM	Bubbler valve closed
5/15/2011	1:24:02 AM	Helium valve opened
5/15/2011	1:24:02 AM	Main Vac valve opened
5/15/2011	1:24:02 AM	Bypass valve opened
5/15/2011	1:24:02 AM	Helium MFC set to  100.000000
5/15/2011	1:24:02 AM	H2 MFC set to  0.000000
5/15/2011	1:24:02 AM	BCl3 MFC set to  0.000000
5/15/2011	1:24:03 AM	PHl3 MFC set to  0.000000
5/15/2011	1:24:03 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:24:03 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:24:03 AM	Tube furnace set to 0
5/15/2011	1:25:03 AM	Helium valve closed
5/15/2011	1:25:03 AM	H2 valve closed
5/15/2011	1:25:03 AM	BCl3 valve closed
5/15/2011	1:25:03 AM	PH3 valve closed
5/15/2011	1:25:03 AM	SiCl4 pre valve closed
5/15/2011	1:25:03 AM	SiCl4 post valve closed
5/15/2011	1:25:03 AM	Bubbler valve closed
5/15/2011	1:25:03 AM	Main Vac valve opened
5/15/2011	1:25:03 AM	Bypass valve opened
5/15/2011	1:25:03 AM	Helium MFC set to  0.000000
5/15/2011	1:25:03 AM	H2 MFC set to  0.000000
5/15/2011	1:25:03 AM	BCl3 MFC set to  0.000000
5/15/2011	1:25:03 AM	PHl3 MFC set to  0.000000
5/15/2011	1:25:03 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:25:03 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:25:03 AM	Tube furnace set to 0
5/15/2011	1:26:03 AM	H2 valve closed
5/15/2011	1:26:03 AM	BCl3 valve closed
5/15/2011	1:26:03 AM	PH3 valve closed
5/15/2011	1:26:03 AM	SiCl4 pre valve closed
5/15/2011	1:26:03 AM	SiCl4 post valve closed
5/15/2011	1:26:03 AM	Bubbler valve closed
5/15/2011	1:26:03 AM	Helium valve opened
5/15/2011	1:26:03 AM	Main Vac valve opened
5/15/2011	1:26:03 AM	Bypass valve opened
5/15/2011	1:26:03 AM	Helium MFC set to  100.000000
5/15/2011	1:26:03 AM	H2 MFC set to  0.000000
5/15/2011	1:26:03 AM	BCl3 MFC set to  0.000000
5/15/2011	1:26:03 AM	PHl3 MFC set to  0.000000
5/15/2011	1:26:03 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:26:03 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:26:03 AM	Tube furnace set to 0
5/15/2011	1:27:03 AM	Helium valve closed
5/15/2011	1:27:03 AM	H2 valve closed
5/15/2011	1:27:03 AM	BCl3 valve closed
5/15/2011	1:27:03 AM	PH3 valve closed
5/15/2011	1:27:03 AM	SiCl4 pre valve closed
5/15/2011	1:27:03 AM	SiCl4 post valve closed
5/15/2011	1:27:03 AM	Bubbler valve closed
5/15/2011	1:27:03 AM	Main Vac valve opened
5/15/2011	1:27:03 AM	Bypass valve opened
5/15/2011	1:27:03 AM	Helium MFC set to  0.000000
5/15/2011	1:27:03 AM	H2 MFC set to  0.000000
5/15/2011	1:27:03 AM	BCl3 MFC set to  0.000000
5/15/2011	1:27:03 AM	PHl3 MFC set to  0.000000
5/15/2011	1:27:03 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:27:03 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:27:03 AM	Tube furnace set to 0
5/15/2011	1:28:03 AM	H2 valve closed
5/15/2011	1:28:03 AM	BCl3 valve closed
5/15/2011	1:28:03 AM	PH3 valve closed
5/15/2011	1:28:03 AM	SiCl4 pre valve closed
5/15/2011	1:28:03 AM	SiCl4 post valve closed
5/15/2011	1:28:03 AM	Bubbler valve closed
5/15/2011	1:28:03 AM	Helium valve opened
5/15/2011	1:28:03 AM	Main Vac valve opened
5/15/2011	1:28:03 AM	Bypass valve opened
5/15/2011	1:28:03 AM	Helium MFC set to  100.000000
5/15/2011	1:28:03 AM	H2 MFC set to  0.000000
5/15/2011	1:28:03 AM	BCl3 MFC set to  0.000000
5/15/2011	1:28:03 AM	PHl3 MFC set to  0.000000
5/15/2011	1:28:03 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:28:03 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:28:03 AM	Tube furnace set to 0
5/15/2011	1:29:03 AM	Helium valve closed
5/15/2011	1:29:03 AM	H2 valve closed
5/15/2011	1:29:03 AM	BCl3 valve closed
5/15/2011	1:29:03 AM	PH3 valve closed
5/15/2011	1:29:04 AM	SiCl4 pre valve closed
5/15/2011	1:29:04 AM	SiCl4 post valve closed
5/15/2011	1:29:04 AM	Bubbler valve closed
5/15/2011	1:29:04 AM	Main Vac valve opened
5/15/2011	1:29:04 AM	Bypass valve opened
5/15/2011	1:29:04 AM	Helium MFC set to  0.000000
5/15/2011	1:29:04 AM	H2 MFC set to  0.000000
5/15/2011	1:29:04 AM	BCl3 MFC set to  0.000000
5/15/2011	1:29:04 AM	PHl3 MFC set to  0.000000
5/15/2011	1:29:04 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:29:04 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:29:04 AM	Tube furnace set to 0
5/15/2011	1:30:04 AM	H2 valve closed
5/15/2011	1:30:04 AM	BCl3 valve closed
5/15/2011	1:30:04 AM	PH3 valve closed
5/15/2011	1:30:04 AM	SiCl4 pre valve closed
5/15/2011	1:30:04 AM	SiCl4 post valve closed
5/15/2011	1:30:04 AM	Bubbler valve closed
5/15/2011	1:30:04 AM	Helium valve opened
5/15/2011	1:30:04 AM	Main Vac valve opened
5/15/2011	1:30:04 AM	Bypass valve opened
5/15/2011	1:30:04 AM	Helium MFC set to  100.000000
5/15/2011	1:30:04 AM	H2 MFC set to  0.000000
5/15/2011	1:30:04 AM	BCl3 MFC set to  0.000000
5/15/2011	1:30:04 AM	PHl3 MFC set to  0.000000
5/15/2011	1:30:04 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:30:04 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:30:04 AM	Tube furnace set to 0
5/15/2011	1:31:04 AM	Helium valve closed
5/15/2011	1:31:04 AM	H2 valve closed
5/15/2011	1:31:04 AM	BCl3 valve closed
5/15/2011	1:31:04 AM	PH3 valve closed
5/15/2011	1:31:04 AM	SiCl4 pre valve closed
5/15/2011	1:31:04 AM	SiCl4 post valve closed
5/15/2011	1:31:04 AM	Bubbler valve closed
5/15/2011	1:31:04 AM	Main Vac valve opened
5/15/2011	1:31:04 AM	Bypass valve opened
5/15/2011	1:31:04 AM	Helium MFC set to  0.000000
5/15/2011	1:31:04 AM	H2 MFC set to  0.000000
5/15/2011	1:31:04 AM	BCl3 MFC set to  0.000000
5/15/2011	1:31:04 AM	PHl3 MFC set to  0.000000
5/15/2011	1:31:04 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:31:04 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:31:04 AM	Tube furnace set to 0
5/15/2011	1:32:04 AM	H2 valve closed
5/15/2011	1:32:04 AM	BCl3 valve closed
5/15/2011	1:32:04 AM	PH3 valve closed
5/15/2011	1:32:04 AM	SiCl4 pre valve closed
5/15/2011	1:32:04 AM	SiCl4 post valve closed
5/15/2011	1:32:04 AM	Bubbler valve closed
5/15/2011	1:32:04 AM	Helium valve opened
5/15/2011	1:32:04 AM	Main Vac valve opened
5/15/2011	1:32:04 AM	Bypass valve opened
5/15/2011	1:32:04 AM	Helium MFC set to  100.000000
5/15/2011	1:32:04 AM	H2 MFC set to  0.000000
5/15/2011	1:32:04 AM	BCl3 MFC set to  0.000000
5/15/2011	1:32:04 AM	PHl3 MFC set to  0.000000
5/15/2011	1:32:04 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:32:04 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:32:04 AM	Tube furnace set to 0
5/15/2011	1:33:04 AM	Helium valve closed
5/15/2011	1:33:04 AM	H2 valve closed
5/15/2011	1:33:04 AM	BCl3 valve closed
5/15/2011	1:33:04 AM	PH3 valve closed
5/15/2011	1:33:04 AM	SiCl4 pre valve closed
5/15/2011	1:33:04 AM	SiCl4 post valve closed
5/15/2011	1:33:04 AM	Bubbler valve closed
5/15/2011	1:33:04 AM	Main Vac valve opened
5/15/2011	1:33:04 AM	Bypass valve opened
5/15/2011	1:33:04 AM	Helium MFC set to  0.000000
5/15/2011	1:33:04 AM	H2 MFC set to  0.000000
5/15/2011	1:33:04 AM	BCl3 MFC set to  0.000000
5/15/2011	1:33:04 AM	PHl3 MFC set to  0.000000
5/15/2011	1:33:04 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:33:04 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:33:04 AM	Tube furnace set to 0
5/15/2011	1:34:05 AM	H2 valve closed
5/15/2011	1:34:05 AM	BCl3 valve closed
5/15/2011	1:34:05 AM	PH3 valve closed
5/15/2011	1:34:05 AM	SiCl4 pre valve closed
5/15/2011	1:34:05 AM	SiCl4 post valve closed
5/15/2011	1:34:05 AM	Bubbler valve closed
5/15/2011	1:34:05 AM	Helium valve opened
5/15/2011	1:34:05 AM	Main Vac valve opened
5/15/2011	1:34:05 AM	Bypass valve opened
5/15/2011	1:34:05 AM	Helium MFC set to  100.000000
5/15/2011	1:34:05 AM	H2 MFC set to  0.000000
5/15/2011	1:34:05 AM	BCl3 MFC set to  0.000000
5/15/2011	1:34:05 AM	PHl3 MFC set to  0.000000
5/15/2011	1:34:05 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:34:05 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:34:05 AM	Tube furnace set to 0
5/15/2011	1:35:05 AM	Helium valve closed
5/15/2011	1:35:05 AM	H2 valve closed
5/15/2011	1:35:05 AM	BCl3 valve closed
5/15/2011	1:35:05 AM	PH3 valve closed
5/15/2011	1:35:05 AM	SiCl4 pre valve closed
5/15/2011	1:35:05 AM	SiCl4 post valve closed
5/15/2011	1:35:05 AM	Bubbler valve closed
5/15/2011	1:35:05 AM	Main Vac valve opened
5/15/2011	1:35:05 AM	Bypass valve opened
5/15/2011	1:35:05 AM	Helium MFC set to  0.000000
5/15/2011	1:35:05 AM	H2 MFC set to  0.000000
5/15/2011	1:35:05 AM	BCl3 MFC set to  0.000000
5/15/2011	1:35:05 AM	PHl3 MFC set to  0.000000
5/15/2011	1:35:05 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:35:05 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:35:05 AM	Tube furnace set to 0
5/15/2011	1:36:05 AM	H2 valve closed
5/15/2011	1:36:05 AM	BCl3 valve closed
5/15/2011	1:36:05 AM	PH3 valve closed
5/15/2011	1:36:05 AM	SiCl4 pre valve closed
5/15/2011	1:36:05 AM	SiCl4 post valve closed
5/15/2011	1:36:05 AM	Bubbler valve closed
5/15/2011	1:36:05 AM	Helium valve opened
5/15/2011	1:36:05 AM	Main Vac valve opened
5/15/2011	1:36:05 AM	Bypass valve opened
5/15/2011	1:36:05 AM	Helium MFC set to  100.000000
5/15/2011	1:36:05 AM	H2 MFC set to  0.000000
5/15/2011	1:36:05 AM	BCl3 MFC set to  0.000000
5/15/2011	1:36:05 AM	PHl3 MFC set to  0.000000
5/15/2011	1:36:05 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:36:05 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:36:05 AM	Tube furnace set to 0
5/15/2011	1:37:05 AM	Helium valve closed
5/15/2011	1:37:05 AM	H2 valve closed
5/15/2011	1:37:05 AM	BCl3 valve closed
5/15/2011	1:37:05 AM	PH3 valve closed
5/15/2011	1:37:05 AM	SiCl4 pre valve closed
5/15/2011	1:37:05 AM	SiCl4 post valve closed
5/15/2011	1:37:05 AM	Bubbler valve closed
5/15/2011	1:37:05 AM	Main Vac valve opened
5/15/2011	1:37:05 AM	Bypass valve opened
5/15/2011	1:37:05 AM	Helium MFC set to  0.000000
5/15/2011	1:37:05 AM	H2 MFC set to  0.000000
5/15/2011	1:37:05 AM	BCl3 MFC set to  0.000000
5/15/2011	1:37:05 AM	PHl3 MFC set to  0.000000
5/15/2011	1:37:05 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:37:05 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:37:05 AM	Tube furnace set to 0
5/15/2011	1:38:05 AM	H2 valve closed
5/15/2011	1:38:05 AM	BCl3 valve closed
5/15/2011	1:38:05 AM	PH3 valve closed
5/15/2011	1:38:05 AM	SiCl4 pre valve closed
5/15/2011	1:38:05 AM	SiCl4 post valve closed
5/15/2011	1:38:05 AM	Bubbler valve closed
5/15/2011	1:38:05 AM	Helium valve opened
5/15/2011	1:38:05 AM	Main Vac valve opened
5/15/2011	1:38:05 AM	Bypass valve opened
5/15/2011	1:38:05 AM	Helium MFC set to  100.000000
5/15/2011	1:38:05 AM	H2 MFC set to  0.000000
5/15/2011	1:38:05 AM	BCl3 MFC set to  0.000000
5/15/2011	1:38:05 AM	PHl3 MFC set to  0.000000
5/15/2011	1:38:05 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:38:05 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:38:06 AM	Tube furnace set to 0
5/15/2011	1:39:06 AM	Helium valve closed
5/15/2011	1:39:06 AM	H2 valve closed
5/15/2011	1:39:06 AM	BCl3 valve closed
5/15/2011	1:39:06 AM	PH3 valve closed
5/15/2011	1:39:06 AM	SiCl4 pre valve closed
5/15/2011	1:39:06 AM	SiCl4 post valve closed
5/15/2011	1:39:06 AM	Bubbler valve closed
5/15/2011	1:39:06 AM	Main Vac valve opened
5/15/2011	1:39:06 AM	Bypass valve opened
5/15/2011	1:39:06 AM	Helium MFC set to  0.000000
5/15/2011	1:39:06 AM	H2 MFC set to  0.000000
5/15/2011	1:39:06 AM	BCl3 MFC set to  0.000000
5/15/2011	1:39:06 AM	PHl3 MFC set to  0.000000
5/15/2011	1:39:06 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:39:06 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:39:06 AM	Tube furnace set to 0
5/15/2011	1:39:07 AM	Run finished at 1:39 AM
5/15/2011	1:39:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	1:39:48 AM	Recipe started at 1:39 AM
5/15/2011	1:39:48 AM	Helium valve closed
5/15/2011	1:39:48 AM	BCl3 valve closed
5/15/2011	1:39:48 AM	PH3 valve closed
5/15/2011	1:39:48 AM	SiCl4 pre valve closed
5/15/2011	1:39:48 AM	SiCl4 post valve closed
5/15/2011	1:39:48 AM	Main Vac valve closed
5/15/2011	1:39:48 AM	Bypass valve closed
5/15/2011	1:39:48 AM	Bubbler valve closed
5/15/2011	1:39:48 AM	H2 valve opened
5/15/2011	1:39:48 AM	Helium MFC set to  0.000000
5/15/2011	1:39:48 AM	H2 MFC set to  500.000000
5/15/2011	1:39:48 AM	BCl3 MFC set to  0.000000
5/15/2011	1:39:48 AM	PHl3 MFC set to  0.000000
5/15/2011	1:39:48 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:39:48 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:39:48 AM	Tube furnace set to 0
5/15/2011	1:41:08 AM	Helium valve closed
5/15/2011	1:41:08 AM	BCl3 valve closed
5/15/2011	1:41:08 AM	PH3 valve closed
5/15/2011	1:41:08 AM	SiCl4 pre valve closed
5/15/2011	1:41:08 AM	SiCl4 post valve closed
5/15/2011	1:41:08 AM	Main Vac valve closed
5/15/2011	1:41:08 AM	Bypass valve closed
5/15/2011	1:41:08 AM	H2 valve opened
5/15/2011	1:41:08 AM	Bubbler valve opened
5/15/2011	1:41:08 AM	Helium MFC set to  0.000000
5/15/2011	1:41:08 AM	H2 MFC set to  500.000000
5/15/2011	1:41:08 AM	BCl3 MFC set to  0.000000
5/15/2011	1:41:08 AM	PHl3 MFC set to  0.000000
5/15/2011	1:41:08 AM	SiCl4 MFC set to  0.000000
5/15/2011	1:41:08 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	1:41:08 AM	Tube furnace set to 1000
5/15/2011	2:01:08 AM	Helium valve closed
5/15/2011	2:01:08 AM	BCl3 valve closed
5/15/2011	2:01:08 AM	Main Vac valve closed
5/15/2011	2:01:08 AM	Bypass valve closed
5/15/2011	2:01:08 AM	H2 valve opened
5/15/2011	2:01:08 AM	PH3 valve opened
5/15/2011	2:01:08 AM	SiCl4 pre valve opened
5/15/2011	2:01:08 AM	SiCl4 post valve opened
5/15/2011	2:01:08 AM	Bubbler valve opened
5/15/2011	2:01:08 AM	Helium MFC set to  0.000000
5/15/2011	2:01:08 AM	H2 MFC set to  500.000000
5/15/2011	2:01:08 AM	BCl3 MFC set to  0.000000
5/15/2011	2:01:08 AM	PHl3 MFC set to  1.000000
5/15/2011	2:01:08 AM	SiCl4 MFC set to  50.000000
5/15/2011	2:01:08 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	2:01:08 AM	Tube furnace set to 1000
5/15/2011	2:17:08 AM	H2 valve closed
5/15/2011	2:17:08 AM	BCl3 valve closed
5/15/2011	2:17:08 AM	PH3 valve closed
5/15/2011	2:17:08 AM	SiCl4 pre valve closed
5/15/2011	2:17:08 AM	SiCl4 post valve closed
5/15/2011	2:17:08 AM	Main Vac valve closed
5/15/2011	2:17:08 AM	Bypass valve closed
5/15/2011	2:17:08 AM	Helium valve opened
5/15/2011	2:17:08 AM	Bubbler valve opened
5/15/2011	2:17:08 AM	Helium MFC set to  500.000000
5/15/2011	2:17:08 AM	H2 MFC set to  0.000000
5/15/2011	2:17:08 AM	BCl3 MFC set to  0.000000
5/15/2011	2:17:08 AM	PHl3 MFC set to  0.000000
5/15/2011	2:17:08 AM	SiCl4 MFC set to  0.000000
5/15/2011	2:17:08 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	2:17:08 AM	Tube furnace set to 0
5/15/2011	2:37:08 AM	Helium valve closed
5/15/2011	2:37:08 AM	H2 valve closed
5/15/2011	2:37:08 AM	BCl3 valve closed
5/15/2011	2:37:08 AM	PH3 valve closed
5/15/2011	2:37:08 AM	SiCl4 pre valve closed
5/15/2011	2:37:08 AM	SiCl4 post valve closed
5/15/2011	2:37:08 AM	Main Vac valve closed
5/15/2011	2:37:08 AM	Bypass valve closed
5/15/2011	2:37:08 AM	Bubbler valve closed
5/15/2011	2:37:08 AM	Helium MFC set to  0.000000
5/15/2011	2:37:08 AM	H2 MFC set to  0.000000
5/15/2011	2:37:08 AM	BCl3 MFC set to  0.000000
5/15/2011	2:37:08 AM	PHl3 MFC set to  0.000000
5/15/2011	2:37:08 AM	SiCl4 MFC set to  0.000000
5/15/2011	2:37:08 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	2:37:08 AM	Tube furnace set to 0
5/15/2011	2:37:09 AM	Run finished at 2:37 AM
5/15/2011	2:59:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	2:59:40 AM	Recipe started at 2:59 AM
5/15/2011	2:59:40 AM	Helium valve closed
5/15/2011	2:59:40 AM	H2 valve closed
5/15/2011	2:59:40 AM	BCl3 valve closed
5/15/2011	2:59:40 AM	PH3 valve closed
5/15/2011	2:59:40 AM	SiCl4 pre valve closed
5/15/2011	2:59:40 AM	SiCl4 post valve closed
5/15/2011	2:59:40 AM	Main Vac valve closed
5/15/2011	2:59:40 AM	Bubbler valve closed
5/15/2011	2:59:40 AM	Bypass valve opened
5/15/2011	2:59:40 AM	Helium MFC set to  0.000000
5/15/2011	2:59:40 AM	H2 MFC set to  0.000000
5/15/2011	2:59:40 AM	BCl3 MFC set to  0.000000
5/15/2011	2:59:40 AM	PHl3 MFC set to  0.000000
5/15/2011	2:59:40 AM	SiCl4 MFC set to  0.000000
5/15/2011	2:59:40 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	2:59:40 AM	Tube furnace set to 0
5/15/2011	3:00:13 AM	Helium valve closed
5/15/2011	3:00:13 AM	H2 valve closed
5/15/2011	3:00:13 AM	BCl3 valve closed
5/15/2011	3:00:13 AM	PH3 valve closed
5/15/2011	3:00:13 AM	SiCl4 pre valve closed
5/15/2011	3:00:13 AM	SiCl4 post valve closed
5/15/2011	3:00:13 AM	Bubbler valve closed
5/15/2011	3:00:13 AM	Main Vac valve opened
5/15/2011	3:00:13 AM	Bypass valve opened
5/15/2011	3:00:13 AM	Helium MFC set to  0.000000
5/15/2011	3:00:13 AM	H2 MFC set to  0.000000
5/15/2011	3:00:13 AM	BCl3 MFC set to  0.000000
5/15/2011	3:00:13 AM	PHl3 MFC set to  0.000000
5/15/2011	3:00:13 AM	SiCl4 MFC set to  0.000000
5/15/2011	3:00:13 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	3:00:14 AM	Tube furnace set to 0
5/15/2011	3:00:14 AM	Run finished at 3:00 AM
5/15/2011	3:00:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	4:23:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	4:23:38 AM	Recipe started at 4:23 AM
5/15/2011	4:23:38 AM	Helium valve closed
5/15/2011	4:23:38 AM	H2 valve closed
5/15/2011	4:23:38 AM	BCl3 valve closed
5/15/2011	4:23:38 AM	PH3 valve closed
5/15/2011	4:23:38 AM	SiCl4 pre valve closed
5/15/2011	4:23:38 AM	SiCl4 post valve closed
5/15/2011	4:23:38 AM	Main Vac valve closed
5/15/2011	4:23:38 AM	Bubbler valve closed
5/15/2011	4:23:38 AM	Bypass valve opened
5/15/2011	4:23:38 AM	Helium MFC set to  0.000000
5/15/2011	4:23:38 AM	H2 MFC set to  0.000000
5/15/2011	4:23:38 AM	BCl3 MFC set to  0.000000
5/15/2011	4:23:38 AM	PHl3 MFC set to  0.000000
5/15/2011	4:23:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:23:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:23:38 AM	Tube furnace set to 0
5/15/2011	4:23:38 AM	Helium valve closed
5/15/2011	4:23:38 AM	H2 valve closed
5/15/2011	4:23:38 AM	BCl3 valve closed
5/15/2011	4:23:38 AM	PH3 valve closed
5/15/2011	4:23:38 AM	SiCl4 pre valve closed
5/15/2011	4:23:38 AM	SiCl4 post valve closed
5/15/2011	4:23:38 AM	Bubbler valve closed
5/15/2011	4:23:38 AM	Main Vac valve opened
5/15/2011	4:23:38 AM	Bypass valve opened
5/15/2011	4:23:38 AM	Helium MFC set to  0.000000
5/15/2011	4:23:38 AM	H2 MFC set to  0.000000
5/15/2011	4:23:38 AM	BCl3 MFC set to  0.000000
5/15/2011	4:23:38 AM	PHl3 MFC set to  0.000000
5/15/2011	4:23:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:23:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:23:38 AM	Tube furnace set to 0
5/15/2011	4:24:38 AM	H2 valve closed
5/15/2011	4:24:38 AM	BCl3 valve closed
5/15/2011	4:24:38 AM	PH3 valve closed
5/15/2011	4:24:38 AM	SiCl4 pre valve closed
5/15/2011	4:24:38 AM	SiCl4 post valve closed
5/15/2011	4:24:38 AM	Bubbler valve closed
5/15/2011	4:24:38 AM	Helium valve opened
5/15/2011	4:24:38 AM	Main Vac valve opened
5/15/2011	4:24:38 AM	Bypass valve opened
5/15/2011	4:24:38 AM	Helium MFC set to  100.000000
5/15/2011	4:24:38 AM	H2 MFC set to  0.000000
5/15/2011	4:24:38 AM	BCl3 MFC set to  0.000000
5/15/2011	4:24:38 AM	PHl3 MFC set to  0.000000
5/15/2011	4:24:38 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:24:38 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:24:39 AM	Tube furnace set to 0
5/15/2011	4:25:39 AM	Helium valve closed
5/15/2011	4:25:39 AM	H2 valve closed
5/15/2011	4:25:39 AM	BCl3 valve closed
5/15/2011	4:25:39 AM	PH3 valve closed
5/15/2011	4:25:39 AM	SiCl4 pre valve closed
5/15/2011	4:25:39 AM	SiCl4 post valve closed
5/15/2011	4:25:39 AM	Bubbler valve closed
5/15/2011	4:25:39 AM	Main Vac valve opened
5/15/2011	4:25:39 AM	Bypass valve opened
5/15/2011	4:25:39 AM	Helium MFC set to  0.000000
5/15/2011	4:25:39 AM	H2 MFC set to  0.000000
5/15/2011	4:25:39 AM	BCl3 MFC set to  0.000000
5/15/2011	4:25:39 AM	PHl3 MFC set to  0.000000
5/15/2011	4:25:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:25:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:25:39 AM	Tube furnace set to 0
5/15/2011	4:26:39 AM	H2 valve closed
5/15/2011	4:26:39 AM	BCl3 valve closed
5/15/2011	4:26:39 AM	PH3 valve closed
5/15/2011	4:26:39 AM	SiCl4 pre valve closed
5/15/2011	4:26:39 AM	SiCl4 post valve closed
5/15/2011	4:26:39 AM	Bubbler valve closed
5/15/2011	4:26:39 AM	Helium valve opened
5/15/2011	4:26:39 AM	Main Vac valve opened
5/15/2011	4:26:39 AM	Bypass valve opened
5/15/2011	4:26:39 AM	Helium MFC set to  100.000000
5/15/2011	4:26:39 AM	H2 MFC set to  0.000000
5/15/2011	4:26:39 AM	BCl3 MFC set to  0.000000
5/15/2011	4:26:39 AM	PHl3 MFC set to  0.000000
5/15/2011	4:26:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:26:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:26:39 AM	Tube furnace set to 0
5/15/2011	4:27:39 AM	Helium valve closed
5/15/2011	4:27:39 AM	H2 valve closed
5/15/2011	4:27:39 AM	BCl3 valve closed
5/15/2011	4:27:39 AM	PH3 valve closed
5/15/2011	4:27:39 AM	SiCl4 pre valve closed
5/15/2011	4:27:39 AM	SiCl4 post valve closed
5/15/2011	4:27:39 AM	Bubbler valve closed
5/15/2011	4:27:39 AM	Main Vac valve opened
5/15/2011	4:27:39 AM	Bypass valve opened
5/15/2011	4:27:39 AM	Helium MFC set to  0.000000
5/15/2011	4:27:39 AM	H2 MFC set to  0.000000
5/15/2011	4:27:39 AM	BCl3 MFC set to  0.000000
5/15/2011	4:27:39 AM	PHl3 MFC set to  0.000000
5/15/2011	4:27:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:27:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:27:39 AM	Tube furnace set to 0
5/15/2011	4:28:39 AM	H2 valve closed
5/15/2011	4:28:39 AM	BCl3 valve closed
5/15/2011	4:28:39 AM	PH3 valve closed
5/15/2011	4:28:39 AM	SiCl4 pre valve closed
5/15/2011	4:28:39 AM	SiCl4 post valve closed
5/15/2011	4:28:39 AM	Bubbler valve closed
5/15/2011	4:28:39 AM	Helium valve opened
5/15/2011	4:28:39 AM	Main Vac valve opened
5/15/2011	4:28:39 AM	Bypass valve opened
5/15/2011	4:28:39 AM	Helium MFC set to  100.000000
5/15/2011	4:28:39 AM	H2 MFC set to  0.000000
5/15/2011	4:28:39 AM	BCl3 MFC set to  0.000000
5/15/2011	4:28:39 AM	PHl3 MFC set to  0.000000
5/15/2011	4:28:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:28:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:28:39 AM	Tube furnace set to 0
5/15/2011	4:29:39 AM	Helium valve closed
5/15/2011	4:29:39 AM	H2 valve closed
5/15/2011	4:29:39 AM	BCl3 valve closed
5/15/2011	4:29:39 AM	PH3 valve closed
5/15/2011	4:29:39 AM	SiCl4 pre valve closed
5/15/2011	4:29:39 AM	SiCl4 post valve closed
5/15/2011	4:29:39 AM	Bubbler valve closed
5/15/2011	4:29:39 AM	Main Vac valve opened
5/15/2011	4:29:39 AM	Bypass valve opened
5/15/2011	4:29:39 AM	Helium MFC set to  0.000000
5/15/2011	4:29:39 AM	H2 MFC set to  0.000000
5/15/2011	4:29:39 AM	BCl3 MFC set to  0.000000
5/15/2011	4:29:39 AM	PHl3 MFC set to  0.000000
5/15/2011	4:29:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:29:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:29:40 AM	Tube furnace set to 0
5/15/2011	4:30:40 AM	H2 valve closed
5/15/2011	4:30:40 AM	BCl3 valve closed
5/15/2011	4:30:40 AM	PH3 valve closed
5/15/2011	4:30:40 AM	SiCl4 pre valve closed
5/15/2011	4:30:40 AM	SiCl4 post valve closed
5/15/2011	4:30:40 AM	Bubbler valve closed
5/15/2011	4:30:40 AM	Helium valve opened
5/15/2011	4:30:40 AM	Main Vac valve opened
5/15/2011	4:30:40 AM	Bypass valve opened
5/15/2011	4:30:40 AM	Helium MFC set to  100.000000
5/15/2011	4:30:40 AM	H2 MFC set to  0.000000
5/15/2011	4:30:40 AM	BCl3 MFC set to  0.000000
5/15/2011	4:30:40 AM	PHl3 MFC set to  0.000000
5/15/2011	4:30:40 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:30:40 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:30:40 AM	Tube furnace set to 0
5/15/2011	4:31:40 AM	Helium valve closed
5/15/2011	4:31:40 AM	H2 valve closed
5/15/2011	4:31:40 AM	BCl3 valve closed
5/15/2011	4:31:40 AM	PH3 valve closed
5/15/2011	4:31:40 AM	SiCl4 pre valve closed
5/15/2011	4:31:40 AM	SiCl4 post valve closed
5/15/2011	4:31:40 AM	Bubbler valve closed
5/15/2011	4:31:40 AM	Main Vac valve opened
5/15/2011	4:31:40 AM	Bypass valve opened
5/15/2011	4:31:40 AM	Helium MFC set to  0.000000
5/15/2011	4:31:40 AM	H2 MFC set to  0.000000
5/15/2011	4:31:40 AM	BCl3 MFC set to  0.000000
5/15/2011	4:31:40 AM	PHl3 MFC set to  0.000000
5/15/2011	4:31:40 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:31:40 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:31:40 AM	Tube furnace set to 0
5/15/2011	4:32:40 AM	H2 valve closed
5/15/2011	4:32:40 AM	BCl3 valve closed
5/15/2011	4:32:40 AM	PH3 valve closed
5/15/2011	4:32:40 AM	SiCl4 pre valve closed
5/15/2011	4:32:40 AM	SiCl4 post valve closed
5/15/2011	4:32:40 AM	Bubbler valve closed
5/15/2011	4:32:40 AM	Helium valve opened
5/15/2011	4:32:40 AM	Main Vac valve opened
5/15/2011	4:32:40 AM	Bypass valve opened
5/15/2011	4:32:40 AM	Helium MFC set to  100.000000
5/15/2011	4:32:40 AM	H2 MFC set to  0.000000
5/15/2011	4:32:40 AM	BCl3 MFC set to  0.000000
5/15/2011	4:32:40 AM	PHl3 MFC set to  0.000000
5/15/2011	4:32:40 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:32:40 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:32:40 AM	Tube furnace set to 0
5/15/2011	4:33:40 AM	Helium valve closed
5/15/2011	4:33:40 AM	H2 valve closed
5/15/2011	4:33:40 AM	BCl3 valve closed
5/15/2011	4:33:40 AM	PH3 valve closed
5/15/2011	4:33:40 AM	SiCl4 pre valve closed
5/15/2011	4:33:40 AM	SiCl4 post valve closed
5/15/2011	4:33:40 AM	Bubbler valve closed
5/15/2011	4:33:40 AM	Main Vac valve opened
5/15/2011	4:33:40 AM	Bypass valve opened
5/15/2011	4:33:40 AM	Helium MFC set to  0.000000
5/15/2011	4:33:40 AM	H2 MFC set to  0.000000
5/15/2011	4:33:40 AM	BCl3 MFC set to  0.000000
5/15/2011	4:33:40 AM	PHl3 MFC set to  0.000000
5/15/2011	4:33:40 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:33:40 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:33:40 AM	Tube furnace set to 0
5/15/2011	4:34:40 AM	H2 valve closed
5/15/2011	4:34:40 AM	BCl3 valve closed
5/15/2011	4:34:40 AM	PH3 valve closed
5/15/2011	4:34:40 AM	SiCl4 pre valve closed
5/15/2011	4:34:40 AM	SiCl4 post valve closed
5/15/2011	4:34:40 AM	Bubbler valve closed
5/15/2011	4:34:41 AM	Helium valve opened
5/15/2011	4:34:41 AM	Main Vac valve opened
5/15/2011	4:34:41 AM	Bypass valve opened
5/15/2011	4:34:41 AM	Helium MFC set to  100.000000
5/15/2011	4:34:41 AM	H2 MFC set to  0.000000
5/15/2011	4:34:41 AM	BCl3 MFC set to  0.000000
5/15/2011	4:34:41 AM	PHl3 MFC set to  0.000000
5/15/2011	4:34:41 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:34:41 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:34:41 AM	Tube furnace set to 0
5/15/2011	4:35:41 AM	Helium valve closed
5/15/2011	4:35:41 AM	H2 valve closed
5/15/2011	4:35:41 AM	BCl3 valve closed
5/15/2011	4:35:41 AM	PH3 valve closed
5/15/2011	4:35:41 AM	SiCl4 pre valve closed
5/15/2011	4:35:41 AM	SiCl4 post valve closed
5/15/2011	4:35:41 AM	Bubbler valve closed
5/15/2011	4:35:41 AM	Main Vac valve opened
5/15/2011	4:35:41 AM	Bypass valve opened
5/15/2011	4:35:41 AM	Helium MFC set to  0.000000
5/15/2011	4:35:41 AM	H2 MFC set to  0.000000
5/15/2011	4:35:41 AM	BCl3 MFC set to  0.000000
5/15/2011	4:35:41 AM	PHl3 MFC set to  0.000000
5/15/2011	4:35:41 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:35:41 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:35:41 AM	Tube furnace set to 0
5/15/2011	4:36:41 AM	H2 valve closed
5/15/2011	4:36:41 AM	BCl3 valve closed
5/15/2011	4:36:41 AM	PH3 valve closed
5/15/2011	4:36:41 AM	SiCl4 pre valve closed
5/15/2011	4:36:41 AM	SiCl4 post valve closed
5/15/2011	4:36:41 AM	Bubbler valve closed
5/15/2011	4:36:41 AM	Helium valve opened
5/15/2011	4:36:41 AM	Main Vac valve opened
5/15/2011	4:36:41 AM	Bypass valve opened
5/15/2011	4:36:41 AM	Helium MFC set to  100.000000
5/15/2011	4:36:41 AM	H2 MFC set to  0.000000
5/15/2011	4:36:41 AM	BCl3 MFC set to  0.000000
5/15/2011	4:36:41 AM	PHl3 MFC set to  0.000000
5/15/2011	4:36:41 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:36:41 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:36:41 AM	Tube furnace set to 0
5/15/2011	4:37:41 AM	Helium valve closed
5/15/2011	4:37:41 AM	H2 valve closed
5/15/2011	4:37:41 AM	BCl3 valve closed
5/15/2011	4:37:41 AM	PH3 valve closed
5/15/2011	4:37:41 AM	SiCl4 pre valve closed
5/15/2011	4:37:41 AM	SiCl4 post valve closed
5/15/2011	4:37:41 AM	Bubbler valve closed
5/15/2011	4:37:41 AM	Main Vac valve opened
5/15/2011	4:37:41 AM	Bypass valve opened
5/15/2011	4:37:41 AM	Helium MFC set to  0.000000
5/15/2011	4:37:41 AM	H2 MFC set to  0.000000
5/15/2011	4:37:41 AM	BCl3 MFC set to  0.000000
5/15/2011	4:37:41 AM	PHl3 MFC set to  0.000000
5/15/2011	4:37:41 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:37:41 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:37:41 AM	Tube furnace set to 0
5/15/2011	4:38:41 AM	H2 valve closed
5/15/2011	4:38:41 AM	BCl3 valve closed
5/15/2011	4:38:41 AM	PH3 valve closed
5/15/2011	4:38:41 AM	SiCl4 pre valve closed
5/15/2011	4:38:41 AM	SiCl4 post valve closed
5/15/2011	4:38:41 AM	Bubbler valve closed
5/15/2011	4:38:41 AM	Helium valve opened
5/15/2011	4:38:41 AM	Main Vac valve opened
5/15/2011	4:38:41 AM	Bypass valve opened
5/15/2011	4:38:41 AM	Helium MFC set to  100.000000
5/15/2011	4:38:41 AM	H2 MFC set to  0.000000
5/15/2011	4:38:41 AM	BCl3 MFC set to  0.000000
5/15/2011	4:38:41 AM	PHl3 MFC set to  0.000000
5/15/2011	4:38:41 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:38:41 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:38:41 AM	Tube furnace set to 0
5/15/2011	4:39:41 AM	Helium valve closed
5/15/2011	4:39:42 AM	H2 valve closed
5/15/2011	4:39:42 AM	BCl3 valve closed
5/15/2011	4:39:42 AM	PH3 valve closed
5/15/2011	4:39:42 AM	SiCl4 pre valve closed
5/15/2011	4:39:42 AM	SiCl4 post valve closed
5/15/2011	4:39:42 AM	Bubbler valve closed
5/15/2011	4:39:42 AM	Main Vac valve opened
5/15/2011	4:39:42 AM	Bypass valve opened
5/15/2011	4:39:42 AM	Helium MFC set to  0.000000
5/15/2011	4:39:42 AM	H2 MFC set to  0.000000
5/15/2011	4:39:42 AM	BCl3 MFC set to  0.000000
5/15/2011	4:39:42 AM	PHl3 MFC set to  0.000000
5/15/2011	4:39:42 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:39:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:39:42 AM	Tube furnace set to 0
5/15/2011	4:40:42 AM	H2 valve closed
5/15/2011	4:40:42 AM	BCl3 valve closed
5/15/2011	4:40:42 AM	PH3 valve closed
5/15/2011	4:40:42 AM	SiCl4 pre valve closed
5/15/2011	4:40:42 AM	SiCl4 post valve closed
5/15/2011	4:40:42 AM	Bubbler valve closed
5/15/2011	4:40:42 AM	Helium valve opened
5/15/2011	4:40:42 AM	Main Vac valve opened
5/15/2011	4:40:42 AM	Bypass valve opened
5/15/2011	4:40:42 AM	Helium MFC set to  100.000000
5/15/2011	4:40:42 AM	H2 MFC set to  0.000000
5/15/2011	4:40:42 AM	BCl3 MFC set to  0.000000
5/15/2011	4:40:42 AM	PHl3 MFC set to  0.000000
5/15/2011	4:40:42 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:40:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:40:42 AM	Tube furnace set to 0
5/15/2011	4:41:42 AM	Helium valve closed
5/15/2011	4:41:42 AM	H2 valve closed
5/15/2011	4:41:42 AM	BCl3 valve closed
5/15/2011	4:41:42 AM	PH3 valve closed
5/15/2011	4:41:42 AM	SiCl4 pre valve closed
5/15/2011	4:41:42 AM	SiCl4 post valve closed
5/15/2011	4:41:42 AM	Bubbler valve closed
5/15/2011	4:41:42 AM	Main Vac valve opened
5/15/2011	4:41:42 AM	Bypass valve opened
5/15/2011	4:41:42 AM	Helium MFC set to  0.000000
5/15/2011	4:41:42 AM	H2 MFC set to  0.000000
5/15/2011	4:41:42 AM	BCl3 MFC set to  0.000000
5/15/2011	4:41:42 AM	PHl3 MFC set to  0.000000
5/15/2011	4:41:42 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:41:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:41:42 AM	Tube furnace set to 0
5/15/2011	4:42:42 AM	H2 valve closed
5/15/2011	4:42:42 AM	BCl3 valve closed
5/15/2011	4:42:42 AM	PH3 valve closed
5/15/2011	4:42:42 AM	SiCl4 pre valve closed
5/15/2011	4:42:42 AM	SiCl4 post valve closed
5/15/2011	4:42:42 AM	Bubbler valve closed
5/15/2011	4:42:42 AM	Helium valve opened
5/15/2011	4:42:42 AM	Main Vac valve opened
5/15/2011	4:42:42 AM	Bypass valve opened
5/15/2011	4:42:42 AM	Helium MFC set to  100.000000
5/15/2011	4:42:42 AM	H2 MFC set to  0.000000
5/15/2011	4:42:42 AM	BCl3 MFC set to  0.000000
5/15/2011	4:42:42 AM	PHl3 MFC set to  0.000000
5/15/2011	4:42:42 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:42:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:42:42 AM	Tube furnace set to 0
5/15/2011	4:43:42 AM	Helium valve closed
5/15/2011	4:43:42 AM	H2 valve closed
5/15/2011	4:43:42 AM	BCl3 valve closed
5/15/2011	4:43:42 AM	PH3 valve closed
5/15/2011	4:43:42 AM	SiCl4 pre valve closed
5/15/2011	4:43:42 AM	SiCl4 post valve closed
5/15/2011	4:43:42 AM	Bubbler valve closed
5/15/2011	4:43:42 AM	Main Vac valve opened
5/15/2011	4:43:42 AM	Bypass valve opened
5/15/2011	4:43:42 AM	Helium MFC set to  0.000000
5/15/2011	4:43:42 AM	H2 MFC set to  0.000000
5/15/2011	4:43:42 AM	BCl3 MFC set to  0.000000
5/15/2011	4:43:42 AM	PHl3 MFC set to  0.000000
5/15/2011	4:43:42 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:43:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:43:42 AM	Tube furnace set to 0
5/15/2011	4:43:43 AM	Run finished at 4:43 AM
5/15/2011	4:43:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	4:44:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	4:44:32 AM	Recipe started at 4:44 AM
5/15/2011	4:44:32 AM	Helium valve closed
5/15/2011	4:44:32 AM	H2 valve closed
5/15/2011	4:44:32 AM	BCl3 valve closed
5/15/2011	4:44:32 AM	PH3 valve closed
5/15/2011	4:44:32 AM	SiCl4 pre valve closed
5/15/2011	4:44:32 AM	SiCl4 post valve closed
5/15/2011	4:44:32 AM	Main Vac valve closed
5/15/2011	4:44:32 AM	Bubbler valve closed
5/15/2011	4:44:32 AM	Bypass valve opened
5/15/2011	4:44:32 AM	Helium MFC set to  0.000000
5/15/2011	4:44:32 AM	H2 MFC set to  0.000000
5/15/2011	4:44:32 AM	BCl3 MFC set to  0.000000
5/15/2011	4:44:32 AM	PHl3 MFC set to  0.000000
5/15/2011	4:44:32 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:44:32 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:44:33 AM	Tube furnace set to 0
5/15/2011	4:44:33 AM	Helium valve closed
5/15/2011	4:44:33 AM	H2 valve closed
5/15/2011	4:44:33 AM	BCl3 valve closed
5/15/2011	4:44:33 AM	PH3 valve closed
5/15/2011	4:44:33 AM	SiCl4 pre valve closed
5/15/2011	4:44:33 AM	SiCl4 post valve closed
5/15/2011	4:44:33 AM	Bubbler valve closed
5/15/2011	4:44:33 AM	Main Vac valve opened
5/15/2011	4:44:33 AM	Bypass valve opened
5/15/2011	4:44:33 AM	Helium MFC set to  0.000000
5/15/2011	4:44:33 AM	H2 MFC set to  0.000000
5/15/2011	4:44:33 AM	BCl3 MFC set to  0.000000
5/15/2011	4:44:33 AM	PHl3 MFC set to  0.000000
5/15/2011	4:44:33 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:44:33 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:44:33 AM	Tube furnace set to 0
5/15/2011	4:45:33 AM	H2 valve closed
5/15/2011	4:45:33 AM	BCl3 valve closed
5/15/2011	4:45:33 AM	PH3 valve closed
5/15/2011	4:45:33 AM	SiCl4 pre valve closed
5/15/2011	4:45:33 AM	SiCl4 post valve closed
5/15/2011	4:45:33 AM	Bubbler valve closed
5/15/2011	4:45:33 AM	Helium valve opened
5/15/2011	4:45:33 AM	Main Vac valve opened
5/15/2011	4:45:33 AM	Bypass valve opened
5/15/2011	4:45:33 AM	Helium MFC set to  100.000000
5/15/2011	4:45:33 AM	H2 MFC set to  0.000000
5/15/2011	4:45:33 AM	BCl3 MFC set to  0.000000
5/15/2011	4:45:33 AM	PHl3 MFC set to  0.000000
5/15/2011	4:45:33 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:45:33 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:45:33 AM	Tube furnace set to 0
5/15/2011	4:46:33 AM	Helium valve closed
5/15/2011	4:46:33 AM	H2 valve closed
5/15/2011	4:46:33 AM	BCl3 valve closed
5/15/2011	4:46:33 AM	PH3 valve closed
5/15/2011	4:46:33 AM	SiCl4 pre valve closed
5/15/2011	4:46:33 AM	SiCl4 post valve closed
5/15/2011	4:46:33 AM	Bubbler valve closed
5/15/2011	4:46:33 AM	Main Vac valve opened
5/15/2011	4:46:33 AM	Bypass valve opened
5/15/2011	4:46:33 AM	Helium MFC set to  0.000000
5/15/2011	4:46:33 AM	H2 MFC set to  0.000000
5/15/2011	4:46:33 AM	BCl3 MFC set to  0.000000
5/15/2011	4:46:33 AM	PHl3 MFC set to  0.000000
5/15/2011	4:46:33 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:46:33 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:46:33 AM	Tube furnace set to 0
5/15/2011	4:47:33 AM	H2 valve closed
5/15/2011	4:47:33 AM	BCl3 valve closed
5/15/2011	4:47:33 AM	PH3 valve closed
5/15/2011	4:47:33 AM	SiCl4 pre valve closed
5/15/2011	4:47:33 AM	SiCl4 post valve closed
5/15/2011	4:47:33 AM	Bubbler valve closed
5/15/2011	4:47:33 AM	Helium valve opened
5/15/2011	4:47:33 AM	Main Vac valve opened
5/15/2011	4:47:33 AM	Bypass valve opened
5/15/2011	4:47:33 AM	Helium MFC set to  100.000000
5/15/2011	4:47:33 AM	H2 MFC set to  0.000000
5/15/2011	4:47:33 AM	BCl3 MFC set to  0.000000
5/15/2011	4:47:33 AM	PHl3 MFC set to  0.000000
5/15/2011	4:47:33 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:47:33 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:47:34 AM	Tube furnace set to 0
5/15/2011	4:48:34 AM	Helium valve closed
5/15/2011	4:48:34 AM	H2 valve closed
5/15/2011	4:48:34 AM	BCl3 valve closed
5/15/2011	4:48:34 AM	PH3 valve closed
5/15/2011	4:48:34 AM	SiCl4 pre valve closed
5/15/2011	4:48:34 AM	SiCl4 post valve closed
5/15/2011	4:48:34 AM	Bubbler valve closed
5/15/2011	4:48:34 AM	Main Vac valve opened
5/15/2011	4:48:34 AM	Bypass valve opened
5/15/2011	4:48:34 AM	Helium MFC set to  0.000000
5/15/2011	4:48:34 AM	H2 MFC set to  0.000000
5/15/2011	4:48:34 AM	BCl3 MFC set to  0.000000
5/15/2011	4:48:34 AM	PHl3 MFC set to  0.000000
5/15/2011	4:48:34 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:48:34 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:48:34 AM	Tube furnace set to 0
5/15/2011	4:49:34 AM	H2 valve closed
5/15/2011	4:49:34 AM	BCl3 valve closed
5/15/2011	4:49:34 AM	PH3 valve closed
5/15/2011	4:49:34 AM	SiCl4 pre valve closed
5/15/2011	4:49:34 AM	SiCl4 post valve closed
5/15/2011	4:49:34 AM	Bubbler valve closed
5/15/2011	4:49:34 AM	Helium valve opened
5/15/2011	4:49:34 AM	Main Vac valve opened
5/15/2011	4:49:34 AM	Bypass valve opened
5/15/2011	4:49:34 AM	Helium MFC set to  100.000000
5/15/2011	4:49:34 AM	H2 MFC set to  0.000000
5/15/2011	4:49:34 AM	BCl3 MFC set to  0.000000
5/15/2011	4:49:34 AM	PHl3 MFC set to  0.000000
5/15/2011	4:49:34 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:49:34 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:49:34 AM	Tube furnace set to 0
5/15/2011	4:50:34 AM	Helium valve closed
5/15/2011	4:50:34 AM	H2 valve closed
5/15/2011	4:50:34 AM	BCl3 valve closed
5/15/2011	4:50:34 AM	PH3 valve closed
5/15/2011	4:50:34 AM	SiCl4 pre valve closed
5/15/2011	4:50:34 AM	SiCl4 post valve closed
5/15/2011	4:50:34 AM	Bubbler valve closed
5/15/2011	4:50:34 AM	Main Vac valve opened
5/15/2011	4:50:34 AM	Bypass valve opened
5/15/2011	4:50:34 AM	Helium MFC set to  0.000000
5/15/2011	4:50:34 AM	H2 MFC set to  0.000000
5/15/2011	4:50:34 AM	BCl3 MFC set to  0.000000
5/15/2011	4:50:34 AM	PHl3 MFC set to  0.000000
5/15/2011	4:50:34 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:50:34 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:50:34 AM	Tube furnace set to 0
5/15/2011	4:51:34 AM	H2 valve closed
5/15/2011	4:51:34 AM	BCl3 valve closed
5/15/2011	4:51:34 AM	PH3 valve closed
5/15/2011	4:51:34 AM	SiCl4 pre valve closed
5/15/2011	4:51:34 AM	SiCl4 post valve closed
5/15/2011	4:51:34 AM	Bubbler valve closed
5/15/2011	4:51:34 AM	Helium valve opened
5/15/2011	4:51:34 AM	Main Vac valve opened
5/15/2011	4:51:34 AM	Bypass valve opened
5/15/2011	4:51:34 AM	Helium MFC set to  100.000000
5/15/2011	4:51:34 AM	H2 MFC set to  0.000000
5/15/2011	4:51:34 AM	BCl3 MFC set to  0.000000
5/15/2011	4:51:34 AM	PHl3 MFC set to  0.000000
5/15/2011	4:51:34 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:51:34 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:51:34 AM	Tube furnace set to 0
5/15/2011	4:52:34 AM	Helium valve closed
5/15/2011	4:52:34 AM	H2 valve closed
5/15/2011	4:52:34 AM	BCl3 valve closed
5/15/2011	4:52:34 AM	PH3 valve closed
5/15/2011	4:52:34 AM	SiCl4 pre valve closed
5/15/2011	4:52:34 AM	SiCl4 post valve closed
5/15/2011	4:52:34 AM	Bubbler valve closed
5/15/2011	4:52:34 AM	Main Vac valve opened
5/15/2011	4:52:34 AM	Bypass valve opened
5/15/2011	4:52:34 AM	Helium MFC set to  0.000000
5/15/2011	4:52:34 AM	H2 MFC set to  0.000000
5/15/2011	4:52:34 AM	BCl3 MFC set to  0.000000
5/15/2011	4:52:34 AM	PHl3 MFC set to  0.000000
5/15/2011	4:52:34 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:52:34 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:52:35 AM	Tube furnace set to 0
5/15/2011	4:53:35 AM	H2 valve closed
5/15/2011	4:53:35 AM	BCl3 valve closed
5/15/2011	4:53:35 AM	PH3 valve closed
5/15/2011	4:53:35 AM	SiCl4 pre valve closed
5/15/2011	4:53:35 AM	SiCl4 post valve closed
5/15/2011	4:53:35 AM	Bubbler valve closed
5/15/2011	4:53:35 AM	Helium valve opened
5/15/2011	4:53:35 AM	Main Vac valve opened
5/15/2011	4:53:35 AM	Bypass valve opened
5/15/2011	4:53:35 AM	Helium MFC set to  100.000000
5/15/2011	4:53:35 AM	H2 MFC set to  0.000000
5/15/2011	4:53:35 AM	BCl3 MFC set to  0.000000
5/15/2011	4:53:35 AM	PHl3 MFC set to  0.000000
5/15/2011	4:53:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:53:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:53:35 AM	Tube furnace set to 0
5/15/2011	4:54:35 AM	Helium valve closed
5/15/2011	4:54:35 AM	H2 valve closed
5/15/2011	4:54:35 AM	BCl3 valve closed
5/15/2011	4:54:35 AM	PH3 valve closed
5/15/2011	4:54:35 AM	SiCl4 pre valve closed
5/15/2011	4:54:35 AM	SiCl4 post valve closed
5/15/2011	4:54:35 AM	Bubbler valve closed
5/15/2011	4:54:35 AM	Main Vac valve opened
5/15/2011	4:54:35 AM	Bypass valve opened
5/15/2011	4:54:35 AM	Helium MFC set to  0.000000
5/15/2011	4:54:35 AM	H2 MFC set to  0.000000
5/15/2011	4:54:35 AM	BCl3 MFC set to  0.000000
5/15/2011	4:54:35 AM	PHl3 MFC set to  0.000000
5/15/2011	4:54:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:54:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:54:35 AM	Tube furnace set to 0
5/15/2011	4:55:35 AM	H2 valve closed
5/15/2011	4:55:35 AM	BCl3 valve closed
5/15/2011	4:55:35 AM	PH3 valve closed
5/15/2011	4:55:35 AM	SiCl4 pre valve closed
5/15/2011	4:55:35 AM	SiCl4 post valve closed
5/15/2011	4:55:35 AM	Bubbler valve closed
5/15/2011	4:55:35 AM	Helium valve opened
5/15/2011	4:55:35 AM	Main Vac valve opened
5/15/2011	4:55:35 AM	Bypass valve opened
5/15/2011	4:55:35 AM	Helium MFC set to  100.000000
5/15/2011	4:55:35 AM	H2 MFC set to  0.000000
5/15/2011	4:55:35 AM	BCl3 MFC set to  0.000000
5/15/2011	4:55:35 AM	PHl3 MFC set to  0.000000
5/15/2011	4:55:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:55:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:55:35 AM	Tube furnace set to 0
5/15/2011	4:56:35 AM	Helium valve closed
5/15/2011	4:56:35 AM	H2 valve closed
5/15/2011	4:56:35 AM	BCl3 valve closed
5/15/2011	4:56:35 AM	PH3 valve closed
5/15/2011	4:56:35 AM	SiCl4 pre valve closed
5/15/2011	4:56:35 AM	SiCl4 post valve closed
5/15/2011	4:56:35 AM	Bubbler valve closed
5/15/2011	4:56:35 AM	Main Vac valve opened
5/15/2011	4:56:35 AM	Bypass valve opened
5/15/2011	4:56:35 AM	Helium MFC set to  0.000000
5/15/2011	4:56:35 AM	H2 MFC set to  0.000000
5/15/2011	4:56:35 AM	BCl3 MFC set to  0.000000
5/15/2011	4:56:35 AM	PHl3 MFC set to  0.000000
5/15/2011	4:56:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:56:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:56:35 AM	Tube furnace set to 0
5/15/2011	4:57:35 AM	H2 valve closed
5/15/2011	4:57:35 AM	BCl3 valve closed
5/15/2011	4:57:35 AM	PH3 valve closed
5/15/2011	4:57:35 AM	SiCl4 pre valve closed
5/15/2011	4:57:35 AM	SiCl4 post valve closed
5/15/2011	4:57:35 AM	Bubbler valve closed
5/15/2011	4:57:35 AM	Helium valve opened
5/15/2011	4:57:35 AM	Main Vac valve opened
5/15/2011	4:57:35 AM	Bypass valve opened
5/15/2011	4:57:35 AM	Helium MFC set to  100.000000
5/15/2011	4:57:35 AM	H2 MFC set to  0.000000
5/15/2011	4:57:35 AM	BCl3 MFC set to  0.000000
5/15/2011	4:57:35 AM	PHl3 MFC set to  0.000000
5/15/2011	4:57:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:57:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:57:36 AM	Tube furnace set to 0
5/15/2011	4:58:36 AM	Helium valve closed
5/15/2011	4:58:36 AM	H2 valve closed
5/15/2011	4:58:36 AM	BCl3 valve closed
5/15/2011	4:58:36 AM	PH3 valve closed
5/15/2011	4:58:36 AM	SiCl4 pre valve closed
5/15/2011	4:58:36 AM	SiCl4 post valve closed
5/15/2011	4:58:36 AM	Bubbler valve closed
5/15/2011	4:58:36 AM	Main Vac valve opened
5/15/2011	4:58:36 AM	Bypass valve opened
5/15/2011	4:58:36 AM	Helium MFC set to  0.000000
5/15/2011	4:58:36 AM	H2 MFC set to  0.000000
5/15/2011	4:58:36 AM	BCl3 MFC set to  0.000000
5/15/2011	4:58:36 AM	PHl3 MFC set to  0.000000
5/15/2011	4:58:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:58:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:58:36 AM	Tube furnace set to 0
5/15/2011	4:59:36 AM	H2 valve closed
5/15/2011	4:59:36 AM	BCl3 valve closed
5/15/2011	4:59:36 AM	PH3 valve closed
5/15/2011	4:59:36 AM	SiCl4 pre valve closed
5/15/2011	4:59:36 AM	SiCl4 post valve closed
5/15/2011	4:59:36 AM	Bubbler valve closed
5/15/2011	4:59:36 AM	Helium valve opened
5/15/2011	4:59:36 AM	Main Vac valve opened
5/15/2011	4:59:36 AM	Bypass valve opened
5/15/2011	4:59:36 AM	Helium MFC set to  100.000000
5/15/2011	4:59:36 AM	H2 MFC set to  0.000000
5/15/2011	4:59:36 AM	BCl3 MFC set to  0.000000
5/15/2011	4:59:36 AM	PHl3 MFC set to  0.000000
5/15/2011	4:59:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	4:59:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	4:59:36 AM	Tube furnace set to 0
5/15/2011	5:00:36 AM	Helium valve closed
5/15/2011	5:00:36 AM	H2 valve closed
5/15/2011	5:00:36 AM	BCl3 valve closed
5/15/2011	5:00:36 AM	PH3 valve closed
5/15/2011	5:00:36 AM	SiCl4 pre valve closed
5/15/2011	5:00:36 AM	SiCl4 post valve closed
5/15/2011	5:00:36 AM	Bubbler valve closed
5/15/2011	5:00:36 AM	Main Vac valve opened
5/15/2011	5:00:36 AM	Bypass valve opened
5/15/2011	5:00:36 AM	Helium MFC set to  0.000000
5/15/2011	5:00:36 AM	H2 MFC set to  0.000000
5/15/2011	5:00:36 AM	BCl3 MFC set to  0.000000
5/15/2011	5:00:36 AM	PHl3 MFC set to  0.000000
5/15/2011	5:00:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:00:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:00:36 AM	Tube furnace set to 0
5/15/2011	5:01:36 AM	H2 valve closed
5/15/2011	5:01:36 AM	BCl3 valve closed
5/15/2011	5:01:36 AM	PH3 valve closed
5/15/2011	5:01:36 AM	SiCl4 pre valve closed
5/15/2011	5:01:36 AM	SiCl4 post valve closed
5/15/2011	5:01:36 AM	Bubbler valve closed
5/15/2011	5:01:36 AM	Helium valve opened
5/15/2011	5:01:36 AM	Main Vac valve opened
5/15/2011	5:01:36 AM	Bypass valve opened
5/15/2011	5:01:36 AM	Helium MFC set to  100.000000
5/15/2011	5:01:36 AM	H2 MFC set to  0.000000
5/15/2011	5:01:36 AM	BCl3 MFC set to  0.000000
5/15/2011	5:01:36 AM	PHl3 MFC set to  0.000000
5/15/2011	5:01:36 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:01:36 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:01:36 AM	Tube furnace set to 0
5/15/2011	5:02:36 AM	Helium valve closed
5/15/2011	5:02:36 AM	H2 valve closed
5/15/2011	5:02:36 AM	BCl3 valve closed
5/15/2011	5:02:36 AM	PH3 valve closed
5/15/2011	5:02:36 AM	SiCl4 pre valve closed
5/15/2011	5:02:36 AM	SiCl4 post valve closed
5/15/2011	5:02:36 AM	Bubbler valve closed
5/15/2011	5:02:36 AM	Main Vac valve opened
5/15/2011	5:02:36 AM	Bypass valve opened
5/15/2011	5:02:36 AM	Helium MFC set to  0.000000
5/15/2011	5:02:36 AM	H2 MFC set to  0.000000
5/15/2011	5:02:36 AM	BCl3 MFC set to  0.000000
5/15/2011	5:02:37 AM	PHl3 MFC set to  0.000000
5/15/2011	5:02:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:02:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:02:37 AM	Tube furnace set to 0
5/15/2011	5:03:37 AM	H2 valve closed
5/15/2011	5:03:37 AM	BCl3 valve closed
5/15/2011	5:03:37 AM	PH3 valve closed
5/15/2011	5:03:37 AM	SiCl4 pre valve closed
5/15/2011	5:03:37 AM	SiCl4 post valve closed
5/15/2011	5:03:37 AM	Bubbler valve closed
5/15/2011	5:03:37 AM	Helium valve opened
5/15/2011	5:03:37 AM	Main Vac valve opened
5/15/2011	5:03:37 AM	Bypass valve opened
5/15/2011	5:03:37 AM	Helium MFC set to  100.000000
5/15/2011	5:03:37 AM	H2 MFC set to  0.000000
5/15/2011	5:03:37 AM	BCl3 MFC set to  0.000000
5/15/2011	5:03:37 AM	PHl3 MFC set to  0.000000
5/15/2011	5:03:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:03:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:03:37 AM	Tube furnace set to 0
5/15/2011	5:04:37 AM	Helium valve closed
5/15/2011	5:04:37 AM	H2 valve closed
5/15/2011	5:04:37 AM	BCl3 valve closed
5/15/2011	5:04:37 AM	PH3 valve closed
5/15/2011	5:04:37 AM	SiCl4 pre valve closed
5/15/2011	5:04:37 AM	SiCl4 post valve closed
5/15/2011	5:04:37 AM	Bubbler valve closed
5/15/2011	5:04:37 AM	Main Vac valve opened
5/15/2011	5:04:37 AM	Bypass valve opened
5/15/2011	5:04:37 AM	Helium MFC set to  0.000000
5/15/2011	5:04:37 AM	H2 MFC set to  0.000000
5/15/2011	5:04:37 AM	BCl3 MFC set to  0.000000
5/15/2011	5:04:37 AM	PHl3 MFC set to  0.000000
5/15/2011	5:04:37 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:04:37 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:04:37 AM	Tube furnace set to 0
5/15/2011	5:04:38 AM	Run finished at 5:04 AM
5/15/2011	5:04:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	5:05:21 AM	Recipe started at 5:05 AM
5/15/2011	5:05:21 AM	Helium valve closed
5/15/2011	5:05:21 AM	BCl3 valve closed
5/15/2011	5:05:21 AM	PH3 valve closed
5/15/2011	5:05:21 AM	SiCl4 pre valve closed
5/15/2011	5:05:21 AM	SiCl4 post valve closed
5/15/2011	5:05:21 AM	Main Vac valve closed
5/15/2011	5:05:21 AM	Bypass valve closed
5/15/2011	5:05:21 AM	Bubbler valve closed
5/15/2011	5:05:21 AM	H2 valve opened
5/15/2011	5:05:21 AM	Helium MFC set to  0.000000
5/15/2011	5:05:21 AM	H2 MFC set to  500.000000
5/15/2011	5:05:21 AM	BCl3 MFC set to  0.000000
5/15/2011	5:05:21 AM	PHl3 MFC set to  0.000000
5/15/2011	5:05:21 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:05:21 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:05:21 AM	Tube furnace set to 0
5/15/2011	5:06:42 AM	Helium valve closed
5/15/2011	5:06:42 AM	BCl3 valve closed
5/15/2011	5:06:42 AM	PH3 valve closed
5/15/2011	5:06:42 AM	SiCl4 pre valve closed
5/15/2011	5:06:42 AM	SiCl4 post valve closed
5/15/2011	5:06:42 AM	Main Vac valve closed
5/15/2011	5:06:42 AM	Bypass valve closed
5/15/2011	5:06:42 AM	H2 valve opened
5/15/2011	5:06:42 AM	Bubbler valve opened
5/15/2011	5:06:42 AM	Helium MFC set to  0.000000
5/15/2011	5:06:42 AM	H2 MFC set to  500.000000
5/15/2011	5:06:42 AM	BCl3 MFC set to  0.000000
5/15/2011	5:06:42 AM	PHl3 MFC set to  0.000000
5/15/2011	5:06:42 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:06:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:06:42 AM	Tube furnace set to 1000
5/15/2011	5:26:42 AM	Helium valve closed
5/15/2011	5:26:42 AM	BCl3 valve closed
5/15/2011	5:26:42 AM	Main Vac valve closed
5/15/2011	5:26:42 AM	Bypass valve closed
5/15/2011	5:26:42 AM	H2 valve opened
5/15/2011	5:26:42 AM	PH3 valve opened
5/15/2011	5:26:42 AM	SiCl4 pre valve opened
5/15/2011	5:26:42 AM	SiCl4 post valve opened
5/15/2011	5:26:42 AM	Bubbler valve opened
5/15/2011	5:26:42 AM	Helium MFC set to  0.000000
5/15/2011	5:26:42 AM	H2 MFC set to  500.000000
5/15/2011	5:26:42 AM	BCl3 MFC set to  0.000000
5/15/2011	5:26:42 AM	PHl3 MFC set to  1.000000
5/15/2011	5:26:42 AM	SiCl4 MFC set to  50.000000
5/15/2011	5:26:42 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:26:43 AM	Tube furnace set to 1000
5/15/2011	5:42:43 AM	H2 valve closed
5/15/2011	5:42:43 AM	BCl3 valve closed
5/15/2011	5:42:43 AM	PH3 valve closed
5/15/2011	5:42:43 AM	SiCl4 pre valve closed
5/15/2011	5:42:43 AM	SiCl4 post valve closed
5/15/2011	5:42:43 AM	Main Vac valve closed
5/15/2011	5:42:43 AM	Bypass valve closed
5/15/2011	5:42:43 AM	Helium valve opened
5/15/2011	5:42:43 AM	Bubbler valve opened
5/15/2011	5:42:43 AM	Helium MFC set to  500.000000
5/15/2011	5:42:43 AM	H2 MFC set to  0.000000
5/15/2011	5:42:43 AM	BCl3 MFC set to  0.000000
5/15/2011	5:42:43 AM	PHl3 MFC set to  0.000000
5/15/2011	5:42:43 AM	SiCl4 MFC set to  0.000000
5/15/2011	5:42:43 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	5:42:43 AM	Tube furnace set to 0
5/15/2011	6:02:43 AM	Helium valve closed
5/15/2011	6:02:43 AM	H2 valve closed
5/15/2011	6:02:43 AM	BCl3 valve closed
5/15/2011	6:02:43 AM	PH3 valve closed
5/15/2011	6:02:43 AM	SiCl4 pre valve closed
5/15/2011	6:02:43 AM	SiCl4 post valve closed
5/15/2011	6:02:43 AM	Main Vac valve closed
5/15/2011	6:02:43 AM	Bypass valve closed
5/15/2011	6:02:43 AM	Bubbler valve closed
5/15/2011	6:02:43 AM	Helium MFC set to  0.000000
5/15/2011	6:02:43 AM	H2 MFC set to  0.000000
5/15/2011	6:02:43 AM	BCl3 MFC set to  0.000000
5/15/2011	6:02:43 AM	PHl3 MFC set to  0.000000
5/15/2011	6:02:43 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:02:43 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:02:43 AM	Tube furnace set to 0
5/15/2011	6:02:43 AM	Run finished at 6:02 AM
5/15/2011	6:05:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:05:49 AM	Recipe started at 6:05 AM
5/15/2011	6:05:49 AM	H2 valve closed
5/15/2011	6:05:49 AM	BCl3 valve closed
5/15/2011	6:05:49 AM	PH3 valve closed
5/15/2011	6:05:49 AM	SiCl4 pre valve closed
5/15/2011	6:05:49 AM	SiCl4 post valve closed
5/15/2011	6:05:49 AM	Main Vac valve closed
5/15/2011	6:05:49 AM	Bypass valve closed
5/15/2011	6:05:49 AM	Bubbler valve closed
5/15/2011	6:05:49 AM	Helium valve opened
5/15/2011	6:05:49 AM	Helium MFC set to  500.000000
5/15/2011	6:05:49 AM	H2 MFC set to  0.000000
5/15/2011	6:05:49 AM	BCl3 MFC set to  0.000000
5/15/2011	6:05:49 AM	PHl3 MFC set to  0.000000
5/15/2011	6:05:49 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:05:49 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:05:49 AM	Tube furnace set to 0
5/15/2011	6:05:50 AM	Helium valve closed
5/15/2011	6:05:50 AM	H2 valve closed
5/15/2011	6:05:50 AM	BCl3 valve closed
5/15/2011	6:05:50 AM	PH3 valve closed
5/15/2011	6:05:50 AM	SiCl4 pre valve closed
5/15/2011	6:05:50 AM	SiCl4 post valve closed
5/15/2011	6:05:50 AM	Main Vac valve closed
5/15/2011	6:05:50 AM	Bypass valve closed
5/15/2011	6:05:50 AM	Bubbler valve closed
5/15/2011	6:05:50 AM	Helium MFC set to  0.000000
5/15/2011	6:05:50 AM	H2 MFC set to  0.000000
5/15/2011	6:05:50 AM	BCl3 MFC set to  0.000000
5/15/2011	6:05:50 AM	PHl3 MFC set to  0.000000
5/15/2011	6:05:50 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:05:50 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:05:50 AM	Tube furnace set to 0
5/15/2011	6:05:50 AM	Run finished at 6:05 AM
5/15/2011	6:05:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:05:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:05:55 AM	Recipe started at 6:05 AM
5/15/2011	6:05:55 AM	H2 valve closed
5/15/2011	6:05:55 AM	BCl3 valve closed
5/15/2011	6:05:55 AM	PH3 valve closed
5/15/2011	6:05:55 AM	SiCl4 pre valve closed
5/15/2011	6:05:55 AM	SiCl4 post valve closed
5/15/2011	6:05:55 AM	Main Vac valve closed
5/15/2011	6:05:55 AM	Bypass valve closed
5/15/2011	6:05:55 AM	Bubbler valve closed
5/15/2011	6:05:55 AM	Helium valve opened
5/15/2011	6:05:55 AM	Helium MFC set to  500.000000
5/15/2011	6:05:55 AM	H2 MFC set to  0.000000
5/15/2011	6:05:55 AM	BCl3 MFC set to  0.000000
5/15/2011	6:05:55 AM	PHl3 MFC set to  0.000000
5/15/2011	6:05:55 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:05:55 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:05:55 AM	Tube furnace set to 0
5/15/2011	6:05:56 AM	Helium valve closed
5/15/2011	6:05:56 AM	H2 valve closed
5/15/2011	6:05:56 AM	BCl3 valve closed
5/15/2011	6:05:56 AM	PH3 valve closed
5/15/2011	6:05:56 AM	SiCl4 pre valve closed
5/15/2011	6:05:56 AM	SiCl4 post valve closed
5/15/2011	6:05:56 AM	Main Vac valve closed
5/15/2011	6:05:56 AM	Bypass valve closed
5/15/2011	6:05:56 AM	Bubbler valve closed
5/15/2011	6:05:56 AM	Helium MFC set to  0.000000
5/15/2011	6:05:56 AM	H2 MFC set to  0.000000
5/15/2011	6:05:56 AM	BCl3 MFC set to  0.000000
5/15/2011	6:05:56 AM	PHl3 MFC set to  0.000000
5/15/2011	6:05:56 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:05:56 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:05:56 AM	Tube furnace set to 0
5/15/2011	6:05:56 AM	Run finished at 6:05 AM
5/15/2011	6:05:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:08:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:08:04 AM	Recipe started at 6:08 AM
5/15/2011	6:08:04 AM	H2 valve closed
5/15/2011	6:08:04 AM	BCl3 valve closed
5/15/2011	6:08:04 AM	PH3 valve closed
5/15/2011	6:08:04 AM	SiCl4 pre valve closed
5/15/2011	6:08:04 AM	SiCl4 post valve closed
5/15/2011	6:08:04 AM	Main Vac valve closed
5/15/2011	6:08:04 AM	Bypass valve closed
5/15/2011	6:08:04 AM	Bubbler valve closed
5/15/2011	6:08:04 AM	Helium valve opened
5/15/2011	6:08:04 AM	Helium MFC set to  500.000000
5/15/2011	6:08:04 AM	H2 MFC set to  0.000000
5/15/2011	6:08:04 AM	BCl3 MFC set to  0.000000
5/15/2011	6:08:04 AM	PHl3 MFC set to  0.000000
5/15/2011	6:08:04 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:08:04 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:08:04 AM	Tube furnace set to 0
5/15/2011	6:08:06 AM	Helium valve closed
5/15/2011	6:08:06 AM	H2 valve closed
5/15/2011	6:08:06 AM	BCl3 valve closed
5/15/2011	6:08:06 AM	PH3 valve closed
5/15/2011	6:08:06 AM	SiCl4 pre valve closed
5/15/2011	6:08:06 AM	SiCl4 post valve closed
5/15/2011	6:08:06 AM	Main Vac valve closed
5/15/2011	6:08:06 AM	Bypass valve closed
5/15/2011	6:08:06 AM	Bubbler valve closed
5/15/2011	6:08:06 AM	Helium MFC set to  0.000000
5/15/2011	6:08:06 AM	H2 MFC set to  0.000000
5/15/2011	6:08:06 AM	BCl3 MFC set to  0.000000
5/15/2011	6:08:06 AM	PHl3 MFC set to  0.000000
5/15/2011	6:08:06 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:08:06 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:08:06 AM	Tube furnace set to 0
5/15/2011	6:08:06 AM	Run finished at 6:08 AM
5/15/2011	6:08:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:16:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	6:16:39 AM	Recipe started at 6:16 AM
5/15/2011	6:16:39 AM	Helium valve closed
5/15/2011	6:16:39 AM	H2 valve closed
5/15/2011	6:16:39 AM	BCl3 valve closed
5/15/2011	6:16:39 AM	PH3 valve closed
5/15/2011	6:16:39 AM	SiCl4 pre valve closed
5/15/2011	6:16:39 AM	SiCl4 post valve closed
5/15/2011	6:16:39 AM	Main Vac valve closed
5/15/2011	6:16:39 AM	Bubbler valve closed
5/15/2011	6:16:39 AM	Bypass valve opened
5/15/2011	6:16:39 AM	Helium MFC set to  0.000000
5/15/2011	6:16:39 AM	H2 MFC set to  0.000000
5/15/2011	6:16:39 AM	BCl3 MFC set to  0.000000
5/15/2011	6:16:39 AM	PHl3 MFC set to  0.000000
5/15/2011	6:16:39 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:16:39 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:16:39 AM	Tube furnace set to 0
5/15/2011	6:17:12 AM	Helium valve closed
5/15/2011	6:17:12 AM	H2 valve closed
5/15/2011	6:17:12 AM	BCl3 valve closed
5/15/2011	6:17:12 AM	PH3 valve closed
5/15/2011	6:17:12 AM	SiCl4 pre valve closed
5/15/2011	6:17:12 AM	SiCl4 post valve closed
5/15/2011	6:17:12 AM	Bubbler valve closed
5/15/2011	6:17:12 AM	Main Vac valve opened
5/15/2011	6:17:12 AM	Bypass valve opened
5/15/2011	6:17:12 AM	Helium MFC set to  0.000000
5/15/2011	6:17:12 AM	H2 MFC set to  0.000000
5/15/2011	6:17:12 AM	BCl3 MFC set to  0.000000
5/15/2011	6:17:12 AM	PHl3 MFC set to  0.000000
5/15/2011	6:17:12 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:17:12 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:17:12 AM	Tube furnace set to 0
5/15/2011	6:17:12 AM	Run finished at 6:17 AM
5/15/2011	6:17:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	6:27:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:27:11 AM	Recipe started at 6:27 AM
5/15/2011	6:27:11 AM	H2 valve closed
5/15/2011	6:27:11 AM	BCl3 valve closed
5/15/2011	6:27:11 AM	PH3 valve closed
5/15/2011	6:27:11 AM	SiCl4 pre valve closed
5/15/2011	6:27:11 AM	SiCl4 post valve closed
5/15/2011	6:27:11 AM	Main Vac valve closed
5/15/2011	6:27:11 AM	Bypass valve closed
5/15/2011	6:27:11 AM	Bubbler valve closed
5/15/2011	6:27:11 AM	Helium valve opened
5/15/2011	6:27:11 AM	Helium MFC set to  500.000000
5/15/2011	6:27:11 AM	H2 MFC set to  0.000000
5/15/2011	6:27:11 AM	BCl3 MFC set to  0.000000
5/15/2011	6:27:11 AM	PHl3 MFC set to  0.000000
5/15/2011	6:27:11 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:27:11 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:27:11 AM	Tube furnace set to 0
5/15/2011	6:28:26 AM	Helium valve closed
5/15/2011	6:28:26 AM	H2 valve closed
5/15/2011	6:28:26 AM	BCl3 valve closed
5/15/2011	6:28:26 AM	PH3 valve closed
5/15/2011	6:28:26 AM	SiCl4 pre valve closed
5/15/2011	6:28:26 AM	SiCl4 post valve closed
5/15/2011	6:28:26 AM	Main Vac valve closed
5/15/2011	6:28:26 AM	Bypass valve closed
5/15/2011	6:28:26 AM	Bubbler valve closed
5/15/2011	6:28:26 AM	Helium MFC set to  0.000000
5/15/2011	6:28:26 AM	H2 MFC set to  0.000000
5/15/2011	6:28:26 AM	BCl3 MFC set to  0.000000
5/15/2011	6:28:26 AM	PHl3 MFC set to  0.000000
5/15/2011	6:28:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:28:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:28:26 AM	Tube furnace set to 0
5/15/2011	6:28:26 AM	Run finished at 6:28 AM
5/15/2011	6:28:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	6:34:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	6:34:48 AM	Recipe started at 6:34 AM
5/15/2011	6:34:48 AM	Helium valve closed
5/15/2011	6:34:48 AM	H2 valve closed
5/15/2011	6:34:48 AM	BCl3 valve closed
5/15/2011	6:34:48 AM	PH3 valve closed
5/15/2011	6:34:48 AM	SiCl4 pre valve closed
5/15/2011	6:34:48 AM	SiCl4 post valve closed
5/15/2011	6:34:48 AM	Main Vac valve closed
5/15/2011	6:34:48 AM	Bubbler valve closed
5/15/2011	6:34:48 AM	Bypass valve opened
5/15/2011	6:34:48 AM	Helium MFC set to  0.000000
5/15/2011	6:34:48 AM	H2 MFC set to  0.000000
5/15/2011	6:34:48 AM	BCl3 MFC set to  0.000000
5/15/2011	6:34:48 AM	PHl3 MFC set to  0.000000
5/15/2011	6:34:48 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:34:48 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:34:48 AM	Tube furnace set to 0
5/15/2011	6:35:18 AM	Helium valve closed
5/15/2011	6:35:18 AM	H2 valve closed
5/15/2011	6:35:18 AM	BCl3 valve closed
5/15/2011	6:35:18 AM	PH3 valve closed
5/15/2011	6:35:18 AM	SiCl4 pre valve closed
5/15/2011	6:35:18 AM	SiCl4 post valve closed
5/15/2011	6:35:18 AM	Bubbler valve closed
5/15/2011	6:35:18 AM	Main Vac valve opened
5/15/2011	6:35:18 AM	Bypass valve opened
5/15/2011	6:35:18 AM	Helium MFC set to  0.000000
5/15/2011	6:35:18 AM	H2 MFC set to  0.000000
5/15/2011	6:35:18 AM	BCl3 MFC set to  0.000000
5/15/2011	6:35:18 AM	PHl3 MFC set to  0.000000
5/15/2011	6:35:18 AM	SiCl4 MFC set to  0.000000
5/15/2011	6:35:18 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	6:35:19 AM	Tube furnace set to 0
5/15/2011	6:35:19 AM	Run finished at 6:35 AM
5/15/2011	6:35:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	7:47:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	7:47:22 AM	Recipe started at 7:47 AM
5/15/2011	7:47:22 AM	Helium valve closed
5/15/2011	7:47:22 AM	H2 valve closed
5/15/2011	7:47:22 AM	BCl3 valve closed
5/15/2011	7:47:22 AM	PH3 valve closed
5/15/2011	7:47:22 AM	SiCl4 pre valve closed
5/15/2011	7:47:22 AM	SiCl4 post valve closed
5/15/2011	7:47:22 AM	Main Vac valve closed
5/15/2011	7:47:22 AM	Bubbler valve closed
5/15/2011	7:47:22 AM	Bypass valve opened
5/15/2011	7:47:22 AM	Helium MFC set to  0.000000
5/15/2011	7:47:22 AM	H2 MFC set to  0.000000
5/15/2011	7:47:22 AM	BCl3 MFC set to  0.000000
5/15/2011	7:47:22 AM	PHl3 MFC set to  0.000000
5/15/2011	7:47:22 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:47:22 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:47:23 AM	Tube furnace set to 0
5/15/2011	7:47:23 AM	Helium valve closed
5/15/2011	7:47:23 AM	H2 valve closed
5/15/2011	7:47:23 AM	BCl3 valve closed
5/15/2011	7:47:23 AM	PH3 valve closed
5/15/2011	7:47:23 AM	SiCl4 pre valve closed
5/15/2011	7:47:23 AM	SiCl4 post valve closed
5/15/2011	7:47:23 AM	Bubbler valve closed
5/15/2011	7:47:23 AM	Main Vac valve opened
5/15/2011	7:47:23 AM	Bypass valve opened
5/15/2011	7:47:23 AM	Helium MFC set to  0.000000
5/15/2011	7:47:23 AM	H2 MFC set to  0.000000
5/15/2011	7:47:23 AM	BCl3 MFC set to  0.000000
5/15/2011	7:47:23 AM	PHl3 MFC set to  0.000000
5/15/2011	7:47:23 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:47:23 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:47:23 AM	Tube furnace set to 0
5/15/2011	7:48:23 AM	H2 valve closed
5/15/2011	7:48:23 AM	BCl3 valve closed
5/15/2011	7:48:23 AM	PH3 valve closed
5/15/2011	7:48:23 AM	SiCl4 pre valve closed
5/15/2011	7:48:23 AM	SiCl4 post valve closed
5/15/2011	7:48:23 AM	Bubbler valve closed
5/15/2011	7:48:23 AM	Helium valve opened
5/15/2011	7:48:23 AM	Main Vac valve opened
5/15/2011	7:48:23 AM	Bypass valve opened
5/15/2011	7:48:23 AM	Helium MFC set to  100.000000
5/15/2011	7:48:23 AM	H2 MFC set to  0.000000
5/15/2011	7:48:23 AM	BCl3 MFC set to  0.000000
5/15/2011	7:48:23 AM	PHl3 MFC set to  0.000000
5/15/2011	7:48:23 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:48:23 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:48:23 AM	Tube furnace set to 0
5/15/2011	7:49:23 AM	Helium valve closed
5/15/2011	7:49:23 AM	H2 valve closed
5/15/2011	7:49:23 AM	BCl3 valve closed
5/15/2011	7:49:23 AM	PH3 valve closed
5/15/2011	7:49:23 AM	SiCl4 pre valve closed
5/15/2011	7:49:23 AM	SiCl4 post valve closed
5/15/2011	7:49:23 AM	Bubbler valve closed
5/15/2011	7:49:23 AM	Main Vac valve opened
5/15/2011	7:49:23 AM	Bypass valve opened
5/15/2011	7:49:23 AM	Helium MFC set to  0.000000
5/15/2011	7:49:23 AM	H2 MFC set to  0.000000
5/15/2011	7:49:23 AM	BCl3 MFC set to  0.000000
5/15/2011	7:49:23 AM	PHl3 MFC set to  0.000000
5/15/2011	7:49:23 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:49:23 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:49:23 AM	Tube furnace set to 0
5/15/2011	7:50:23 AM	H2 valve closed
5/15/2011	7:50:23 AM	BCl3 valve closed
5/15/2011	7:50:23 AM	PH3 valve closed
5/15/2011	7:50:23 AM	SiCl4 pre valve closed
5/15/2011	7:50:24 AM	SiCl4 post valve closed
5/15/2011	7:50:24 AM	Bubbler valve closed
5/15/2011	7:50:24 AM	Helium valve opened
5/15/2011	7:50:24 AM	Main Vac valve opened
5/15/2011	7:50:24 AM	Bypass valve opened
5/15/2011	7:50:24 AM	Helium MFC set to  100.000000
5/15/2011	7:50:24 AM	H2 MFC set to  0.000000
5/15/2011	7:50:24 AM	BCl3 MFC set to  0.000000
5/15/2011	7:50:24 AM	PHl3 MFC set to  0.000000
5/15/2011	7:50:24 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:50:24 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:50:24 AM	Tube furnace set to 0
5/15/2011	7:51:24 AM	Helium valve closed
5/15/2011	7:51:24 AM	H2 valve closed
5/15/2011	7:51:24 AM	BCl3 valve closed
5/15/2011	7:51:24 AM	PH3 valve closed
5/15/2011	7:51:24 AM	SiCl4 pre valve closed
5/15/2011	7:51:24 AM	SiCl4 post valve closed
5/15/2011	7:51:24 AM	Bubbler valve closed
5/15/2011	7:51:24 AM	Main Vac valve opened
5/15/2011	7:51:24 AM	Bypass valve opened
5/15/2011	7:51:24 AM	Helium MFC set to  0.000000
5/15/2011	7:51:24 AM	H2 MFC set to  0.000000
5/15/2011	7:51:24 AM	BCl3 MFC set to  0.000000
5/15/2011	7:51:24 AM	PHl3 MFC set to  0.000000
5/15/2011	7:51:24 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:51:24 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:51:24 AM	Tube furnace set to 0
5/15/2011	7:52:24 AM	H2 valve closed
5/15/2011	7:52:24 AM	BCl3 valve closed
5/15/2011	7:52:24 AM	PH3 valve closed
5/15/2011	7:52:24 AM	SiCl4 pre valve closed
5/15/2011	7:52:24 AM	SiCl4 post valve closed
5/15/2011	7:52:24 AM	Bubbler valve closed
5/15/2011	7:52:24 AM	Helium valve opened
5/15/2011	7:52:24 AM	Main Vac valve opened
5/15/2011	7:52:24 AM	Bypass valve opened
5/15/2011	7:52:24 AM	Helium MFC set to  100.000000
5/15/2011	7:52:24 AM	H2 MFC set to  0.000000
5/15/2011	7:52:24 AM	BCl3 MFC set to  0.000000
5/15/2011	7:52:24 AM	PHl3 MFC set to  0.000000
5/15/2011	7:52:24 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:52:24 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:52:24 AM	Tube furnace set to 0
5/15/2011	7:53:24 AM	Helium valve closed
5/15/2011	7:53:24 AM	H2 valve closed
5/15/2011	7:53:24 AM	BCl3 valve closed
5/15/2011	7:53:24 AM	PH3 valve closed
5/15/2011	7:53:24 AM	SiCl4 pre valve closed
5/15/2011	7:53:24 AM	SiCl4 post valve closed
5/15/2011	7:53:24 AM	Bubbler valve closed
5/15/2011	7:53:24 AM	Main Vac valve opened
5/15/2011	7:53:24 AM	Bypass valve opened
5/15/2011	7:53:24 AM	Helium MFC set to  0.000000
5/15/2011	7:53:24 AM	H2 MFC set to  0.000000
5/15/2011	7:53:24 AM	BCl3 MFC set to  0.000000
5/15/2011	7:53:24 AM	PHl3 MFC set to  0.000000
5/15/2011	7:53:24 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:53:24 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:53:24 AM	Tube furnace set to 0
5/15/2011	7:54:24 AM	H2 valve closed
5/15/2011	7:54:24 AM	BCl3 valve closed
5/15/2011	7:54:24 AM	PH3 valve closed
5/15/2011	7:54:24 AM	SiCl4 pre valve closed
5/15/2011	7:54:24 AM	SiCl4 post valve closed
5/15/2011	7:54:24 AM	Bubbler valve closed
5/15/2011	7:54:24 AM	Helium valve opened
5/15/2011	7:54:24 AM	Main Vac valve opened
5/15/2011	7:54:24 AM	Bypass valve opened
5/15/2011	7:54:24 AM	Helium MFC set to  100.000000
5/15/2011	7:54:24 AM	H2 MFC set to  0.000000
5/15/2011	7:54:24 AM	BCl3 MFC set to  0.000000
5/15/2011	7:54:24 AM	PHl3 MFC set to  0.000000
5/15/2011	7:54:24 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:54:24 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:54:24 AM	Tube furnace set to 0
5/15/2011	7:55:25 AM	Helium valve closed
5/15/2011	7:55:25 AM	H2 valve closed
5/15/2011	7:55:25 AM	BCl3 valve closed
5/15/2011	7:55:25 AM	PH3 valve closed
5/15/2011	7:55:25 AM	SiCl4 pre valve closed
5/15/2011	7:55:25 AM	SiCl4 post valve closed
5/15/2011	7:55:25 AM	Bubbler valve closed
5/15/2011	7:55:25 AM	Main Vac valve opened
5/15/2011	7:55:25 AM	Bypass valve opened
5/15/2011	7:55:25 AM	Helium MFC set to  0.000000
5/15/2011	7:55:25 AM	H2 MFC set to  0.000000
5/15/2011	7:55:25 AM	BCl3 MFC set to  0.000000
5/15/2011	7:55:25 AM	PHl3 MFC set to  0.000000
5/15/2011	7:55:25 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:55:25 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:55:25 AM	Tube furnace set to 0
5/15/2011	7:56:25 AM	H2 valve closed
5/15/2011	7:56:25 AM	BCl3 valve closed
5/15/2011	7:56:25 AM	PH3 valve closed
5/15/2011	7:56:25 AM	SiCl4 pre valve closed
5/15/2011	7:56:25 AM	SiCl4 post valve closed
5/15/2011	7:56:25 AM	Bubbler valve closed
5/15/2011	7:56:25 AM	Helium valve opened
5/15/2011	7:56:25 AM	Main Vac valve opened
5/15/2011	7:56:25 AM	Bypass valve opened
5/15/2011	7:56:25 AM	Helium MFC set to  100.000000
5/15/2011	7:56:25 AM	H2 MFC set to  0.000000
5/15/2011	7:56:25 AM	BCl3 MFC set to  0.000000
5/15/2011	7:56:25 AM	PHl3 MFC set to  0.000000
5/15/2011	7:56:25 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:56:25 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:56:25 AM	Tube furnace set to 0
5/15/2011	7:57:25 AM	Helium valve closed
5/15/2011	7:57:25 AM	H2 valve closed
5/15/2011	7:57:25 AM	BCl3 valve closed
5/15/2011	7:57:25 AM	PH3 valve closed
5/15/2011	7:57:25 AM	SiCl4 pre valve closed
5/15/2011	7:57:25 AM	SiCl4 post valve closed
5/15/2011	7:57:25 AM	Bubbler valve closed
5/15/2011	7:57:25 AM	Main Vac valve opened
5/15/2011	7:57:25 AM	Bypass valve opened
5/15/2011	7:57:25 AM	Helium MFC set to  0.000000
5/15/2011	7:57:25 AM	H2 MFC set to  0.000000
5/15/2011	7:57:25 AM	BCl3 MFC set to  0.000000
5/15/2011	7:57:25 AM	PHl3 MFC set to  0.000000
5/15/2011	7:57:25 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:57:25 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:57:25 AM	Tube furnace set to 0
5/15/2011	7:58:25 AM	H2 valve closed
5/15/2011	7:58:25 AM	BCl3 valve closed
5/15/2011	7:58:25 AM	PH3 valve closed
5/15/2011	7:58:25 AM	SiCl4 pre valve closed
5/15/2011	7:58:25 AM	SiCl4 post valve closed
5/15/2011	7:58:25 AM	Bubbler valve closed
5/15/2011	7:58:25 AM	Helium valve opened
5/15/2011	7:58:25 AM	Main Vac valve opened
5/15/2011	7:58:25 AM	Bypass valve opened
5/15/2011	7:58:25 AM	Helium MFC set to  100.000000
5/15/2011	7:58:25 AM	H2 MFC set to  0.000000
5/15/2011	7:58:25 AM	BCl3 MFC set to  0.000000
5/15/2011	7:58:25 AM	PHl3 MFC set to  0.000000
5/15/2011	7:58:25 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:58:25 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:58:25 AM	Tube furnace set to 0
5/15/2011	7:59:25 AM	Helium valve closed
5/15/2011	7:59:25 AM	H2 valve closed
5/15/2011	7:59:25 AM	BCl3 valve closed
5/15/2011	7:59:25 AM	PH3 valve closed
5/15/2011	7:59:25 AM	SiCl4 pre valve closed
5/15/2011	7:59:25 AM	SiCl4 post valve closed
5/15/2011	7:59:25 AM	Bubbler valve closed
5/15/2011	7:59:25 AM	Main Vac valve opened
5/15/2011	7:59:25 AM	Bypass valve opened
5/15/2011	7:59:25 AM	Helium MFC set to  0.000000
5/15/2011	7:59:25 AM	H2 MFC set to  0.000000
5/15/2011	7:59:25 AM	BCl3 MFC set to  0.000000
5/15/2011	7:59:25 AM	PHl3 MFC set to  0.000000
5/15/2011	7:59:25 AM	SiCl4 MFC set to  0.000000
5/15/2011	7:59:25 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	7:59:26 AM	Tube furnace set to 0
5/15/2011	8:00:26 AM	H2 valve closed
5/15/2011	8:00:26 AM	BCl3 valve closed
5/15/2011	8:00:26 AM	PH3 valve closed
5/15/2011	8:00:26 AM	SiCl4 pre valve closed
5/15/2011	8:00:26 AM	SiCl4 post valve closed
5/15/2011	8:00:26 AM	Bubbler valve closed
5/15/2011	8:00:26 AM	Helium valve opened
5/15/2011	8:00:26 AM	Main Vac valve opened
5/15/2011	8:00:26 AM	Bypass valve opened
5/15/2011	8:00:26 AM	Helium MFC set to  100.000000
5/15/2011	8:00:26 AM	H2 MFC set to  0.000000
5/15/2011	8:00:26 AM	BCl3 MFC set to  0.000000
5/15/2011	8:00:26 AM	PHl3 MFC set to  0.000000
5/15/2011	8:00:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:00:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:00:26 AM	Tube furnace set to 0
5/15/2011	8:01:26 AM	Helium valve closed
5/15/2011	8:01:26 AM	H2 valve closed
5/15/2011	8:01:26 AM	BCl3 valve closed
5/15/2011	8:01:26 AM	PH3 valve closed
5/15/2011	8:01:26 AM	SiCl4 pre valve closed
5/15/2011	8:01:26 AM	SiCl4 post valve closed
5/15/2011	8:01:26 AM	Bubbler valve closed
5/15/2011	8:01:26 AM	Main Vac valve opened
5/15/2011	8:01:26 AM	Bypass valve opened
5/15/2011	8:01:26 AM	Helium MFC set to  0.000000
5/15/2011	8:01:26 AM	H2 MFC set to  0.000000
5/15/2011	8:01:26 AM	BCl3 MFC set to  0.000000
5/15/2011	8:01:26 AM	PHl3 MFC set to  0.000000
5/15/2011	8:01:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:01:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:01:26 AM	Tube furnace set to 0
5/15/2011	8:02:26 AM	H2 valve closed
5/15/2011	8:02:26 AM	BCl3 valve closed
5/15/2011	8:02:26 AM	PH3 valve closed
5/15/2011	8:02:26 AM	SiCl4 pre valve closed
5/15/2011	8:02:26 AM	SiCl4 post valve closed
5/15/2011	8:02:26 AM	Bubbler valve closed
5/15/2011	8:02:26 AM	Helium valve opened
5/15/2011	8:02:26 AM	Main Vac valve opened
5/15/2011	8:02:26 AM	Bypass valve opened
5/15/2011	8:02:26 AM	Helium MFC set to  100.000000
5/15/2011	8:02:26 AM	H2 MFC set to  0.000000
5/15/2011	8:02:26 AM	BCl3 MFC set to  0.000000
5/15/2011	8:02:26 AM	PHl3 MFC set to  0.000000
5/15/2011	8:02:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:02:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:02:26 AM	Tube furnace set to 0
5/15/2011	8:03:26 AM	Helium valve closed
5/15/2011	8:03:26 AM	H2 valve closed
5/15/2011	8:03:26 AM	BCl3 valve closed
5/15/2011	8:03:26 AM	PH3 valve closed
5/15/2011	8:03:26 AM	SiCl4 pre valve closed
5/15/2011	8:03:26 AM	SiCl4 post valve closed
5/15/2011	8:03:26 AM	Bubbler valve closed
5/15/2011	8:03:26 AM	Main Vac valve opened
5/15/2011	8:03:26 AM	Bypass valve opened
5/15/2011	8:03:26 AM	Helium MFC set to  0.000000
5/15/2011	8:03:26 AM	H2 MFC set to  0.000000
5/15/2011	8:03:26 AM	BCl3 MFC set to  0.000000
5/15/2011	8:03:26 AM	PHl3 MFC set to  0.000000
5/15/2011	8:03:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:03:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:03:26 AM	Tube furnace set to 0
5/15/2011	8:04:26 AM	H2 valve closed
5/15/2011	8:04:26 AM	BCl3 valve closed
5/15/2011	8:04:26 AM	PH3 valve closed
5/15/2011	8:04:26 AM	SiCl4 pre valve closed
5/15/2011	8:04:26 AM	SiCl4 post valve closed
5/15/2011	8:04:26 AM	Bubbler valve closed
5/15/2011	8:04:26 AM	Helium valve opened
5/15/2011	8:04:26 AM	Main Vac valve opened
5/15/2011	8:04:26 AM	Bypass valve opened
5/15/2011	8:04:26 AM	Helium MFC set to  100.000000
5/15/2011	8:04:26 AM	H2 MFC set to  0.000000
5/15/2011	8:04:26 AM	BCl3 MFC set to  0.000000
5/15/2011	8:04:26 AM	PHl3 MFC set to  0.000000
5/15/2011	8:04:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:04:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:04:27 AM	Tube furnace set to 0
5/15/2011	8:05:27 AM	Helium valve closed
5/15/2011	8:05:27 AM	H2 valve closed
5/15/2011	8:05:27 AM	BCl3 valve closed
5/15/2011	8:05:27 AM	PH3 valve closed
5/15/2011	8:05:27 AM	SiCl4 pre valve closed
5/15/2011	8:05:27 AM	SiCl4 post valve closed
5/15/2011	8:05:27 AM	Bubbler valve closed
5/15/2011	8:05:27 AM	Main Vac valve opened
5/15/2011	8:05:27 AM	Bypass valve opened
5/15/2011	8:05:27 AM	Helium MFC set to  0.000000
5/15/2011	8:05:27 AM	H2 MFC set to  0.000000
5/15/2011	8:05:27 AM	BCl3 MFC set to  0.000000
5/15/2011	8:05:27 AM	PHl3 MFC set to  0.000000
5/15/2011	8:05:27 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:05:27 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:05:27 AM	Tube furnace set to 0
5/15/2011	8:06:27 AM	H2 valve closed
5/15/2011	8:06:27 AM	BCl3 valve closed
5/15/2011	8:06:27 AM	PH3 valve closed
5/15/2011	8:06:27 AM	SiCl4 pre valve closed
5/15/2011	8:06:27 AM	SiCl4 post valve closed
5/15/2011	8:06:27 AM	Bubbler valve closed
5/15/2011	8:06:27 AM	Helium valve opened
5/15/2011	8:06:27 AM	Main Vac valve opened
5/15/2011	8:06:27 AM	Bypass valve opened
5/15/2011	8:06:27 AM	Helium MFC set to  100.000000
5/15/2011	8:06:27 AM	H2 MFC set to  0.000000
5/15/2011	8:06:27 AM	BCl3 MFC set to  0.000000
5/15/2011	8:06:27 AM	PHl3 MFC set to  0.000000
5/15/2011	8:06:27 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:06:27 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:06:27 AM	Tube furnace set to 0
5/15/2011	8:07:27 AM	Helium valve closed
5/15/2011	8:07:27 AM	H2 valve closed
5/15/2011	8:07:27 AM	BCl3 valve closed
5/15/2011	8:07:27 AM	PH3 valve closed
5/15/2011	8:07:27 AM	SiCl4 pre valve closed
5/15/2011	8:07:27 AM	SiCl4 post valve closed
5/15/2011	8:07:27 AM	Bubbler valve closed
5/15/2011	8:07:27 AM	Main Vac valve opened
5/15/2011	8:07:27 AM	Bypass valve opened
5/15/2011	8:07:27 AM	Helium MFC set to  0.000000
5/15/2011	8:07:27 AM	H2 MFC set to  0.000000
5/15/2011	8:07:27 AM	BCl3 MFC set to  0.000000
5/15/2011	8:07:27 AM	PHl3 MFC set to  0.000000
5/15/2011	8:07:27 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:07:27 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:07:27 AM	Tube furnace set to 0
5/15/2011	8:07:28 AM	Run finished at 8:07 AM
5/15/2011	8:07:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	8:08:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	8:08:12 AM	Recipe started at 8:08 AM
5/15/2011	8:08:12 AM	Helium valve closed
5/15/2011	8:08:12 AM	H2 valve closed
5/15/2011	8:08:12 AM	BCl3 valve closed
5/15/2011	8:08:12 AM	PH3 valve closed
5/15/2011	8:08:12 AM	SiCl4 pre valve closed
5/15/2011	8:08:12 AM	SiCl4 post valve closed
5/15/2011	8:08:12 AM	Main Vac valve closed
5/15/2011	8:08:12 AM	Bubbler valve closed
5/15/2011	8:08:12 AM	Bypass valve opened
5/15/2011	8:08:12 AM	Helium MFC set to  0.000000
5/15/2011	8:08:12 AM	H2 MFC set to  0.000000
5/15/2011	8:08:12 AM	BCl3 MFC set to  0.000000
5/15/2011	8:08:12 AM	PHl3 MFC set to  0.000000
5/15/2011	8:08:12 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:08:12 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:08:12 AM	Tube furnace set to 0
5/15/2011	8:08:12 AM	Helium valve closed
5/15/2011	8:08:12 AM	H2 valve closed
5/15/2011	8:08:12 AM	BCl3 valve closed
5/15/2011	8:08:12 AM	PH3 valve closed
5/15/2011	8:08:12 AM	SiCl4 pre valve closed
5/15/2011	8:08:12 AM	SiCl4 post valve closed
5/15/2011	8:08:12 AM	Bubbler valve closed
5/15/2011	8:08:12 AM	Main Vac valve opened
5/15/2011	8:08:12 AM	Bypass valve opened
5/15/2011	8:08:12 AM	Helium MFC set to  0.000000
5/15/2011	8:08:12 AM	H2 MFC set to  0.000000
5/15/2011	8:08:12 AM	BCl3 MFC set to  0.000000
5/15/2011	8:08:12 AM	PHl3 MFC set to  0.000000
5/15/2011	8:08:12 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:08:12 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:08:12 AM	Tube furnace set to 0
5/15/2011	8:09:12 AM	H2 valve closed
5/15/2011	8:09:12 AM	BCl3 valve closed
5/15/2011	8:09:12 AM	PH3 valve closed
5/15/2011	8:09:12 AM	SiCl4 pre valve closed
5/15/2011	8:09:12 AM	SiCl4 post valve closed
5/15/2011	8:09:12 AM	Bubbler valve closed
5/15/2011	8:09:12 AM	Helium valve opened
5/15/2011	8:09:12 AM	Main Vac valve opened
5/15/2011	8:09:12 AM	Bypass valve opened
5/15/2011	8:09:12 AM	Helium MFC set to  100.000000
5/15/2011	8:09:12 AM	H2 MFC set to  0.000000
5/15/2011	8:09:12 AM	BCl3 MFC set to  0.000000
5/15/2011	8:09:12 AM	PHl3 MFC set to  0.000000
5/15/2011	8:09:12 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:09:12 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:09:12 AM	Tube furnace set to 0
5/15/2011	8:10:13 AM	Helium valve closed
5/15/2011	8:10:13 AM	H2 valve closed
5/15/2011	8:10:13 AM	BCl3 valve closed
5/15/2011	8:10:13 AM	PH3 valve closed
5/15/2011	8:10:13 AM	SiCl4 pre valve closed
5/15/2011	8:10:13 AM	SiCl4 post valve closed
5/15/2011	8:10:13 AM	Bubbler valve closed
5/15/2011	8:10:13 AM	Main Vac valve opened
5/15/2011	8:10:13 AM	Bypass valve opened
5/15/2011	8:10:13 AM	Helium MFC set to  0.000000
5/15/2011	8:10:13 AM	H2 MFC set to  0.000000
5/15/2011	8:10:13 AM	BCl3 MFC set to  0.000000
5/15/2011	8:10:13 AM	PHl3 MFC set to  0.000000
5/15/2011	8:10:13 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:10:13 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:10:13 AM	Tube furnace set to 0
5/15/2011	8:11:13 AM	H2 valve closed
5/15/2011	8:11:13 AM	BCl3 valve closed
5/15/2011	8:11:13 AM	PH3 valve closed
5/15/2011	8:11:13 AM	SiCl4 pre valve closed
5/15/2011	8:11:13 AM	SiCl4 post valve closed
5/15/2011	8:11:13 AM	Bubbler valve closed
5/15/2011	8:11:13 AM	Helium valve opened
5/15/2011	8:11:13 AM	Main Vac valve opened
5/15/2011	8:11:13 AM	Bypass valve opened
5/15/2011	8:11:13 AM	Helium MFC set to  100.000000
5/15/2011	8:11:13 AM	H2 MFC set to  0.000000
5/15/2011	8:11:13 AM	BCl3 MFC set to  0.000000
5/15/2011	8:11:13 AM	PHl3 MFC set to  0.000000
5/15/2011	8:11:13 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:11:13 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:11:13 AM	Tube furnace set to 0
5/15/2011	8:12:13 AM	Helium valve closed
5/15/2011	8:12:13 AM	H2 valve closed
5/15/2011	8:12:13 AM	BCl3 valve closed
5/15/2011	8:12:13 AM	PH3 valve closed
5/15/2011	8:12:13 AM	SiCl4 pre valve closed
5/15/2011	8:12:13 AM	SiCl4 post valve closed
5/15/2011	8:12:13 AM	Bubbler valve closed
5/15/2011	8:12:13 AM	Main Vac valve opened
5/15/2011	8:12:13 AM	Bypass valve opened
5/15/2011	8:12:13 AM	Helium MFC set to  0.000000
5/15/2011	8:12:13 AM	H2 MFC set to  0.000000
5/15/2011	8:12:13 AM	BCl3 MFC set to  0.000000
5/15/2011	8:12:13 AM	PHl3 MFC set to  0.000000
5/15/2011	8:12:13 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:12:13 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:12:13 AM	Tube furnace set to 0
5/15/2011	8:13:13 AM	H2 valve closed
5/15/2011	8:13:13 AM	BCl3 valve closed
5/15/2011	8:13:13 AM	PH3 valve closed
5/15/2011	8:13:13 AM	SiCl4 pre valve closed
5/15/2011	8:13:13 AM	SiCl4 post valve closed
5/15/2011	8:13:13 AM	Bubbler valve closed
5/15/2011	8:13:13 AM	Helium valve opened
5/15/2011	8:13:13 AM	Main Vac valve opened
5/15/2011	8:13:13 AM	Bypass valve opened
5/15/2011	8:13:13 AM	Helium MFC set to  100.000000
5/15/2011	8:13:13 AM	H2 MFC set to  0.000000
5/15/2011	8:13:13 AM	BCl3 MFC set to  0.000000
5/15/2011	8:13:13 AM	PHl3 MFC set to  0.000000
5/15/2011	8:13:13 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:13:13 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:13:13 AM	Tube furnace set to 0
5/15/2011	8:14:13 AM	Helium valve closed
5/15/2011	8:14:13 AM	H2 valve closed
5/15/2011	8:14:13 AM	BCl3 valve closed
5/15/2011	8:14:13 AM	PH3 valve closed
5/15/2011	8:14:13 AM	SiCl4 pre valve closed
5/15/2011	8:14:13 AM	SiCl4 post valve closed
5/15/2011	8:14:13 AM	Bubbler valve closed
5/15/2011	8:14:13 AM	Main Vac valve opened
5/15/2011	8:14:13 AM	Bypass valve opened
5/15/2011	8:14:13 AM	Helium MFC set to  0.000000
5/15/2011	8:14:13 AM	H2 MFC set to  0.000000
5/15/2011	8:14:13 AM	BCl3 MFC set to  0.000000
5/15/2011	8:14:13 AM	PHl3 MFC set to  0.000000
5/15/2011	8:14:13 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:14:13 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:14:14 AM	Tube furnace set to 0
5/15/2011	8:15:14 AM	H2 valve closed
5/15/2011	8:15:14 AM	BCl3 valve closed
5/15/2011	8:15:14 AM	PH3 valve closed
5/15/2011	8:15:14 AM	SiCl4 pre valve closed
5/15/2011	8:15:14 AM	SiCl4 post valve closed
5/15/2011	8:15:14 AM	Bubbler valve closed
5/15/2011	8:15:14 AM	Helium valve opened
5/15/2011	8:15:14 AM	Main Vac valve opened
5/15/2011	8:15:14 AM	Bypass valve opened
5/15/2011	8:15:14 AM	Helium MFC set to  100.000000
5/15/2011	8:15:14 AM	H2 MFC set to  0.000000
5/15/2011	8:15:14 AM	BCl3 MFC set to  0.000000
5/15/2011	8:15:14 AM	PHl3 MFC set to  0.000000
5/15/2011	8:15:14 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:15:14 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:15:14 AM	Tube furnace set to 0
5/15/2011	8:16:14 AM	Helium valve closed
5/15/2011	8:16:14 AM	H2 valve closed
5/15/2011	8:16:14 AM	BCl3 valve closed
5/15/2011	8:16:14 AM	PH3 valve closed
5/15/2011	8:16:14 AM	SiCl4 pre valve closed
5/15/2011	8:16:14 AM	SiCl4 post valve closed
5/15/2011	8:16:14 AM	Bubbler valve closed
5/15/2011	8:16:14 AM	Main Vac valve opened
5/15/2011	8:16:14 AM	Bypass valve opened
5/15/2011	8:16:14 AM	Helium MFC set to  0.000000
5/15/2011	8:16:14 AM	H2 MFC set to  0.000000
5/15/2011	8:16:14 AM	BCl3 MFC set to  0.000000
5/15/2011	8:16:14 AM	PHl3 MFC set to  0.000000
5/15/2011	8:16:14 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:16:14 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:16:14 AM	Tube furnace set to 0
5/15/2011	8:17:14 AM	H2 valve closed
5/15/2011	8:17:14 AM	BCl3 valve closed
5/15/2011	8:17:14 AM	PH3 valve closed
5/15/2011	8:17:14 AM	SiCl4 pre valve closed
5/15/2011	8:17:14 AM	SiCl4 post valve closed
5/15/2011	8:17:14 AM	Bubbler valve closed
5/15/2011	8:17:14 AM	Helium valve opened
5/15/2011	8:17:14 AM	Main Vac valve opened
5/15/2011	8:17:14 AM	Bypass valve opened
5/15/2011	8:17:14 AM	Helium MFC set to  100.000000
5/15/2011	8:17:14 AM	H2 MFC set to  0.000000
5/15/2011	8:17:14 AM	BCl3 MFC set to  0.000000
5/15/2011	8:17:14 AM	PHl3 MFC set to  0.000000
5/15/2011	8:17:14 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:17:14 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:17:14 AM	Tube furnace set to 0
5/15/2011	8:18:14 AM	Helium valve closed
5/15/2011	8:18:14 AM	H2 valve closed
5/15/2011	8:18:14 AM	BCl3 valve closed
5/15/2011	8:18:14 AM	PH3 valve closed
5/15/2011	8:18:14 AM	SiCl4 pre valve closed
5/15/2011	8:18:14 AM	SiCl4 post valve closed
5/15/2011	8:18:14 AM	Bubbler valve closed
5/15/2011	8:18:14 AM	Main Vac valve opened
5/15/2011	8:18:14 AM	Bypass valve opened
5/15/2011	8:18:14 AM	Helium MFC set to  0.000000
5/15/2011	8:18:14 AM	H2 MFC set to  0.000000
5/15/2011	8:18:14 AM	BCl3 MFC set to  0.000000
5/15/2011	8:18:14 AM	PHl3 MFC set to  0.000000
5/15/2011	8:18:14 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:18:14 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:18:14 AM	Tube furnace set to 0
5/15/2011	8:19:14 AM	H2 valve closed
5/15/2011	8:19:14 AM	BCl3 valve closed
5/15/2011	8:19:14 AM	PH3 valve closed
5/15/2011	8:19:14 AM	SiCl4 pre valve closed
5/15/2011	8:19:14 AM	SiCl4 post valve closed
5/15/2011	8:19:14 AM	Bubbler valve closed
5/15/2011	8:19:14 AM	Helium valve opened
5/15/2011	8:19:14 AM	Main Vac valve opened
5/15/2011	8:19:14 AM	Bypass valve opened
5/15/2011	8:19:14 AM	Helium MFC set to  100.000000
5/15/2011	8:19:14 AM	H2 MFC set to  0.000000
5/15/2011	8:19:14 AM	BCl3 MFC set to  0.000000
5/15/2011	8:19:14 AM	PHl3 MFC set to  0.000000
5/15/2011	8:19:14 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:19:14 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:19:15 AM	Tube furnace set to 0
5/15/2011	8:20:15 AM	Helium valve closed
5/15/2011	8:20:15 AM	H2 valve closed
5/15/2011	8:20:15 AM	BCl3 valve closed
5/15/2011	8:20:15 AM	PH3 valve closed
5/15/2011	8:20:15 AM	SiCl4 pre valve closed
5/15/2011	8:20:15 AM	SiCl4 post valve closed
5/15/2011	8:20:15 AM	Bubbler valve closed
5/15/2011	8:20:15 AM	Main Vac valve opened
5/15/2011	8:20:15 AM	Bypass valve opened
5/15/2011	8:20:15 AM	Helium MFC set to  0.000000
5/15/2011	8:20:15 AM	H2 MFC set to  0.000000
5/15/2011	8:20:15 AM	BCl3 MFC set to  0.000000
5/15/2011	8:20:15 AM	PHl3 MFC set to  0.000000
5/15/2011	8:20:15 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:20:15 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:20:15 AM	Tube furnace set to 0
5/15/2011	8:21:15 AM	H2 valve closed
5/15/2011	8:21:15 AM	BCl3 valve closed
5/15/2011	8:21:15 AM	PH3 valve closed
5/15/2011	8:21:15 AM	SiCl4 pre valve closed
5/15/2011	8:21:15 AM	SiCl4 post valve closed
5/15/2011	8:21:15 AM	Bubbler valve closed
5/15/2011	8:21:15 AM	Helium valve opened
5/15/2011	8:21:15 AM	Main Vac valve opened
5/15/2011	8:21:15 AM	Bypass valve opened
5/15/2011	8:21:15 AM	Helium MFC set to  100.000000
5/15/2011	8:21:15 AM	H2 MFC set to  0.000000
5/15/2011	8:21:15 AM	BCl3 MFC set to  0.000000
5/15/2011	8:21:15 AM	PHl3 MFC set to  0.000000
5/15/2011	8:21:15 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:21:15 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:21:15 AM	Tube furnace set to 0
5/15/2011	8:22:15 AM	Helium valve closed
5/15/2011	8:22:15 AM	H2 valve closed
5/15/2011	8:22:15 AM	BCl3 valve closed
5/15/2011	8:22:15 AM	PH3 valve closed
5/15/2011	8:22:15 AM	SiCl4 pre valve closed
5/15/2011	8:22:15 AM	SiCl4 post valve closed
5/15/2011	8:22:15 AM	Bubbler valve closed
5/15/2011	8:22:15 AM	Main Vac valve opened
5/15/2011	8:22:15 AM	Bypass valve opened
5/15/2011	8:22:15 AM	Helium MFC set to  0.000000
5/15/2011	8:22:15 AM	H2 MFC set to  0.000000
5/15/2011	8:22:15 AM	BCl3 MFC set to  0.000000
5/15/2011	8:22:15 AM	PHl3 MFC set to  0.000000
5/15/2011	8:22:15 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:22:15 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:22:15 AM	Tube furnace set to 0
5/15/2011	8:23:15 AM	H2 valve closed
5/15/2011	8:23:15 AM	BCl3 valve closed
5/15/2011	8:23:15 AM	PH3 valve closed
5/15/2011	8:23:15 AM	SiCl4 pre valve closed
5/15/2011	8:23:15 AM	SiCl4 post valve closed
5/15/2011	8:23:15 AM	Bubbler valve closed
5/15/2011	8:23:15 AM	Helium valve opened
5/15/2011	8:23:15 AM	Main Vac valve opened
5/15/2011	8:23:15 AM	Bypass valve opened
5/15/2011	8:23:15 AM	Helium MFC set to  100.000000
5/15/2011	8:23:15 AM	H2 MFC set to  0.000000
5/15/2011	8:23:15 AM	BCl3 MFC set to  0.000000
5/15/2011	8:23:15 AM	PHl3 MFC set to  0.000000
5/15/2011	8:23:15 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:23:15 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:23:15 AM	Tube furnace set to 0
5/15/2011	8:24:15 AM	Helium valve closed
5/15/2011	8:24:15 AM	H2 valve closed
5/15/2011	8:24:15 AM	BCl3 valve closed
5/15/2011	8:24:15 AM	PH3 valve closed
5/15/2011	8:24:15 AM	SiCl4 pre valve closed
5/15/2011	8:24:15 AM	SiCl4 post valve closed
5/15/2011	8:24:15 AM	Bubbler valve closed
5/15/2011	8:24:15 AM	Main Vac valve opened
5/15/2011	8:24:15 AM	Bypass valve opened
5/15/2011	8:24:15 AM	Helium MFC set to  0.000000
5/15/2011	8:24:15 AM	H2 MFC set to  0.000000
5/15/2011	8:24:15 AM	BCl3 MFC set to  0.000000
5/15/2011	8:24:15 AM	PHl3 MFC set to  0.000000
5/15/2011	8:24:15 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:24:15 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:24:16 AM	Tube furnace set to 0
5/15/2011	8:25:16 AM	H2 valve closed
5/15/2011	8:25:16 AM	BCl3 valve closed
5/15/2011	8:25:16 AM	PH3 valve closed
5/15/2011	8:25:16 AM	SiCl4 pre valve closed
5/15/2011	8:25:16 AM	SiCl4 post valve closed
5/15/2011	8:25:16 AM	Bubbler valve closed
5/15/2011	8:25:16 AM	Helium valve opened
5/15/2011	8:25:16 AM	Main Vac valve opened
5/15/2011	8:25:16 AM	Bypass valve opened
5/15/2011	8:25:16 AM	Helium MFC set to  100.000000
5/15/2011	8:25:16 AM	H2 MFC set to  0.000000
5/15/2011	8:25:16 AM	BCl3 MFC set to  0.000000
5/15/2011	8:25:16 AM	PHl3 MFC set to  0.000000
5/15/2011	8:25:16 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:25:16 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:25:16 AM	Tube furnace set to 0
5/15/2011	8:26:16 AM	Helium valve closed
5/15/2011	8:26:16 AM	H2 valve closed
5/15/2011	8:26:16 AM	BCl3 valve closed
5/15/2011	8:26:16 AM	PH3 valve closed
5/15/2011	8:26:16 AM	SiCl4 pre valve closed
5/15/2011	8:26:16 AM	SiCl4 post valve closed
5/15/2011	8:26:16 AM	Bubbler valve closed
5/15/2011	8:26:16 AM	Main Vac valve opened
5/15/2011	8:26:16 AM	Bypass valve opened
5/15/2011	8:26:16 AM	Helium MFC set to  0.000000
5/15/2011	8:26:16 AM	H2 MFC set to  0.000000
5/15/2011	8:26:16 AM	BCl3 MFC set to  0.000000
5/15/2011	8:26:16 AM	PHl3 MFC set to  0.000000
5/15/2011	8:26:16 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:26:16 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:26:16 AM	Tube furnace set to 0
5/15/2011	8:27:16 AM	H2 valve closed
5/15/2011	8:27:16 AM	BCl3 valve closed
5/15/2011	8:27:16 AM	PH3 valve closed
5/15/2011	8:27:16 AM	SiCl4 pre valve closed
5/15/2011	8:27:16 AM	SiCl4 post valve closed
5/15/2011	8:27:16 AM	Bubbler valve closed
5/15/2011	8:27:16 AM	Helium valve opened
5/15/2011	8:27:16 AM	Main Vac valve opened
5/15/2011	8:27:16 AM	Bypass valve opened
5/15/2011	8:27:16 AM	Helium MFC set to  100.000000
5/15/2011	8:27:16 AM	H2 MFC set to  0.000000
5/15/2011	8:27:16 AM	BCl3 MFC set to  0.000000
5/15/2011	8:27:16 AM	PHl3 MFC set to  0.000000
5/15/2011	8:27:16 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:27:16 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:27:16 AM	Tube furnace set to 0
5/15/2011	8:28:16 AM	Helium valve closed
5/15/2011	8:28:16 AM	H2 valve closed
5/15/2011	8:28:16 AM	BCl3 valve closed
5/15/2011	8:28:16 AM	PH3 valve closed
5/15/2011	8:28:16 AM	SiCl4 pre valve closed
5/15/2011	8:28:16 AM	SiCl4 post valve closed
5/15/2011	8:28:16 AM	Bubbler valve closed
5/15/2011	8:28:16 AM	Main Vac valve opened
5/15/2011	8:28:16 AM	Bypass valve opened
5/15/2011	8:28:16 AM	Helium MFC set to  0.000000
5/15/2011	8:28:16 AM	H2 MFC set to  0.000000
5/15/2011	8:28:16 AM	BCl3 MFC set to  0.000000
5/15/2011	8:28:16 AM	PHl3 MFC set to  0.000000
5/15/2011	8:28:16 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:28:16 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:28:16 AM	Tube furnace set to 0
5/15/2011	8:28:17 AM	Run finished at 8:28 AM
5/15/2011	8:28:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/15/2011	8:29:04 AM	Recipe started at 8:29 AM
5/15/2011	8:29:05 AM	Helium valve closed
5/15/2011	8:29:05 AM	BCl3 valve closed
5/15/2011	8:29:05 AM	PH3 valve closed
5/15/2011	8:29:05 AM	SiCl4 pre valve closed
5/15/2011	8:29:05 AM	SiCl4 post valve closed
5/15/2011	8:29:05 AM	Main Vac valve closed
5/15/2011	8:29:05 AM	Bypass valve closed
5/15/2011	8:29:05 AM	Bubbler valve closed
5/15/2011	8:29:05 AM	H2 valve opened
5/15/2011	8:29:05 AM	Helium MFC set to  0.000000
5/15/2011	8:29:05 AM	H2 MFC set to  500.000000
5/15/2011	8:29:05 AM	BCl3 MFC set to  0.000000
5/15/2011	8:29:05 AM	PHl3 MFC set to  0.000000
5/15/2011	8:29:05 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:29:05 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:29:05 AM	Tube furnace set to 0
5/15/2011	8:30:25 AM	Helium valve closed
5/15/2011	8:30:25 AM	BCl3 valve closed
5/15/2011	8:30:25 AM	PH3 valve closed
5/15/2011	8:30:25 AM	SiCl4 pre valve closed
5/15/2011	8:30:25 AM	SiCl4 post valve closed
5/15/2011	8:30:25 AM	Main Vac valve closed
5/15/2011	8:30:25 AM	Bypass valve closed
5/15/2011	8:30:25 AM	H2 valve opened
5/15/2011	8:30:25 AM	Bubbler valve opened
5/15/2011	8:30:25 AM	Helium MFC set to  0.000000
5/15/2011	8:30:25 AM	H2 MFC set to  500.000000
5/15/2011	8:30:25 AM	BCl3 MFC set to  0.000000
5/15/2011	8:30:25 AM	PHl3 MFC set to  0.000000
5/15/2011	8:30:25 AM	SiCl4 MFC set to  0.000000
5/15/2011	8:30:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:30:26 AM	Tube furnace set to 1000
5/15/2011	8:50:26 AM	Helium valve closed
5/15/2011	8:50:26 AM	BCl3 valve closed
5/15/2011	8:50:26 AM	Main Vac valve closed
5/15/2011	8:50:26 AM	Bypass valve closed
5/15/2011	8:50:26 AM	H2 valve opened
5/15/2011	8:50:26 AM	PH3 valve opened
5/15/2011	8:50:26 AM	SiCl4 pre valve opened
5/15/2011	8:50:26 AM	SiCl4 post valve opened
5/15/2011	8:50:26 AM	Bubbler valve opened
5/15/2011	8:50:26 AM	Helium MFC set to  0.000000
5/15/2011	8:50:26 AM	H2 MFC set to  500.000000
5/15/2011	8:50:26 AM	BCl3 MFC set to  0.000000
5/15/2011	8:50:26 AM	PHl3 MFC set to  1.000000
5/15/2011	8:50:26 AM	SiCl4 MFC set to  50.000000
5/15/2011	8:50:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	8:50:26 AM	Tube furnace set to 1000
5/15/2011	9:06:26 AM	H2 valve closed
5/15/2011	9:06:26 AM	BCl3 valve closed
5/15/2011	9:06:26 AM	PH3 valve closed
5/15/2011	9:06:26 AM	SiCl4 pre valve closed
5/15/2011	9:06:26 AM	SiCl4 post valve closed
5/15/2011	9:06:26 AM	Main Vac valve closed
5/15/2011	9:06:26 AM	Bypass valve closed
5/15/2011	9:06:26 AM	Helium valve opened
5/15/2011	9:06:26 AM	Bubbler valve opened
5/15/2011	9:06:26 AM	Helium MFC set to  500.000000
5/15/2011	9:06:26 AM	H2 MFC set to  0.000000
5/15/2011	9:06:26 AM	BCl3 MFC set to  0.000000
5/15/2011	9:06:26 AM	PHl3 MFC set to  0.000000
5/15/2011	9:06:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:06:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:06:26 AM	Tube furnace set to 0
5/15/2011	9:26:26 AM	Helium valve closed
5/15/2011	9:26:26 AM	H2 valve closed
5/15/2011	9:26:26 AM	BCl3 valve closed
5/15/2011	9:26:26 AM	PH3 valve closed
5/15/2011	9:26:26 AM	SiCl4 pre valve closed
5/15/2011	9:26:26 AM	SiCl4 post valve closed
5/15/2011	9:26:26 AM	Main Vac valve closed
5/15/2011	9:26:26 AM	Bypass valve closed
5/15/2011	9:26:26 AM	Bubbler valve closed
5/15/2011	9:26:26 AM	Helium MFC set to  0.000000
5/15/2011	9:26:26 AM	H2 MFC set to  0.000000
5/15/2011	9:26:26 AM	BCl3 MFC set to  0.000000
5/15/2011	9:26:26 AM	PHl3 MFC set to  0.000000
5/15/2011	9:26:26 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:26:26 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:26:26 AM	Tube furnace set to 0
5/15/2011	9:26:26 AM	Run finished at 9:26 AM
5/15/2011	9:28:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	9:28:54 AM	Recipe started at 9:28 AM
5/15/2011	9:28:54 AM	H2 valve closed
5/15/2011	9:28:54 AM	BCl3 valve closed
5/15/2011	9:28:54 AM	PH3 valve closed
5/15/2011	9:28:54 AM	SiCl4 pre valve closed
5/15/2011	9:28:54 AM	SiCl4 post valve closed
5/15/2011	9:28:54 AM	Main Vac valve closed
5/15/2011	9:28:54 AM	Bypass valve closed
5/15/2011	9:28:54 AM	Bubbler valve closed
5/15/2011	9:28:54 AM	Helium valve opened
5/15/2011	9:28:54 AM	Helium MFC set to  500.000000
5/15/2011	9:28:54 AM	H2 MFC set to  0.000000
5/15/2011	9:28:54 AM	BCl3 MFC set to  0.000000
5/15/2011	9:28:54 AM	PHl3 MFC set to  0.000000
5/15/2011	9:28:54 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:28:54 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:28:54 AM	Tube furnace set to 0
5/15/2011	9:28:55 AM	Helium valve closed
5/15/2011	9:28:55 AM	H2 valve closed
5/15/2011	9:28:55 AM	BCl3 valve closed
5/15/2011	9:28:55 AM	PH3 valve closed
5/15/2011	9:28:55 AM	SiCl4 pre valve closed
5/15/2011	9:28:55 AM	SiCl4 post valve closed
5/15/2011	9:28:55 AM	Main Vac valve closed
5/15/2011	9:28:55 AM	Bypass valve closed
5/15/2011	9:28:55 AM	Bubbler valve closed
5/15/2011	9:28:55 AM	Helium MFC set to  0.000000
5/15/2011	9:28:55 AM	H2 MFC set to  0.000000
5/15/2011	9:28:55 AM	BCl3 MFC set to  0.000000
5/15/2011	9:28:55 AM	PHl3 MFC set to  0.000000
5/15/2011	9:28:55 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:28:55 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:28:55 AM	Tube furnace set to 0
5/15/2011	9:28:56 AM	Run finished at 9:28 AM
5/15/2011	9:28:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	9:40:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	9:40:08 AM	Recipe started at 9:40 AM
5/15/2011	9:40:08 AM	H2 valve closed
5/15/2011	9:40:08 AM	BCl3 valve closed
5/15/2011	9:40:08 AM	PH3 valve closed
5/15/2011	9:40:09 AM	SiCl4 pre valve closed
5/15/2011	9:40:09 AM	SiCl4 post valve closed
5/15/2011	9:40:09 AM	Main Vac valve closed
5/15/2011	9:40:09 AM	Bypass valve closed
5/15/2011	9:40:09 AM	Bubbler valve closed
5/15/2011	9:40:09 AM	Helium valve opened
5/15/2011	9:40:09 AM	Helium MFC set to  500.000000
5/15/2011	9:40:09 AM	H2 MFC set to  0.000000
5/15/2011	9:40:09 AM	BCl3 MFC set to  0.000000
5/15/2011	9:40:09 AM	PHl3 MFC set to  0.000000
5/15/2011	9:40:09 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:40:09 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:40:09 AM	Tube furnace set to 0
5/15/2011	9:40:14 AM	Helium valve closed
5/15/2011	9:40:14 AM	H2 valve closed
5/15/2011	9:40:14 AM	BCl3 valve closed
5/15/2011	9:40:14 AM	PH3 valve closed
5/15/2011	9:40:14 AM	SiCl4 pre valve closed
5/15/2011	9:40:14 AM	SiCl4 post valve closed
5/15/2011	9:40:14 AM	Main Vac valve closed
5/15/2011	9:40:14 AM	Bypass valve closed
5/15/2011	9:40:14 AM	Bubbler valve closed
5/15/2011	9:40:14 AM	Helium MFC set to  0.000000
5/15/2011	9:40:14 AM	H2 MFC set to  0.000000
5/15/2011	9:40:14 AM	BCl3 MFC set to  0.000000
5/15/2011	9:40:14 AM	PHl3 MFC set to  0.000000
5/15/2011	9:40:14 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:40:14 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:40:14 AM	Tube furnace set to 0
5/15/2011	9:40:15 AM	Run finished at 9:40 AM
5/15/2011	9:40:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/15/2011	9:43:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	9:43:55 AM	Recipe started at 9:43 AM
5/15/2011	9:43:55 AM	Helium valve closed
5/15/2011	9:43:55 AM	H2 valve closed
5/15/2011	9:43:55 AM	BCl3 valve closed
5/15/2011	9:43:55 AM	PH3 valve closed
5/15/2011	9:43:55 AM	SiCl4 pre valve closed
5/15/2011	9:43:55 AM	SiCl4 post valve closed
5/15/2011	9:43:55 AM	Main Vac valve closed
5/15/2011	9:43:55 AM	Bubbler valve closed
5/15/2011	9:43:55 AM	Bypass valve opened
5/15/2011	9:43:55 AM	Helium MFC set to  0.000000
5/15/2011	9:43:55 AM	H2 MFC set to  0.000000
5/15/2011	9:43:55 AM	BCl3 MFC set to  0.000000
5/15/2011	9:43:55 AM	PHl3 MFC set to  0.000000
5/15/2011	9:43:55 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:43:55 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:43:55 AM	Tube furnace set to 0
5/15/2011	9:44:27 AM	Helium valve closed
5/15/2011	9:44:27 AM	H2 valve closed
5/15/2011	9:44:27 AM	BCl3 valve closed
5/15/2011	9:44:27 AM	PH3 valve closed
5/15/2011	9:44:27 AM	SiCl4 pre valve closed
5/15/2011	9:44:27 AM	SiCl4 post valve closed
5/15/2011	9:44:27 AM	Bubbler valve closed
5/15/2011	9:44:27 AM	Main Vac valve opened
5/15/2011	9:44:27 AM	Bypass valve opened
5/15/2011	9:44:27 AM	Helium MFC set to  0.000000
5/15/2011	9:44:27 AM	H2 MFC set to  0.000000
5/15/2011	9:44:27 AM	BCl3 MFC set to  0.000000
5/15/2011	9:44:27 AM	PHl3 MFC set to  0.000000
5/15/2011	9:44:27 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:44:27 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:44:27 AM	Tube furnace set to 0
5/15/2011	9:44:27 AM	Run finished at 9:44 AM
5/15/2011	9:44:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/15/2011	9:44:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/15/2011	9:44:35 AM	Recipe started at 9:44 AM
5/15/2011	9:44:35 AM	Helium valve closed
5/15/2011	9:44:35 AM	H2 valve closed
5/15/2011	9:44:35 AM	BCl3 valve closed
5/15/2011	9:44:35 AM	PH3 valve closed
5/15/2011	9:44:35 AM	SiCl4 pre valve closed
5/15/2011	9:44:35 AM	SiCl4 post valve closed
5/15/2011	9:44:35 AM	Main Vac valve closed
5/15/2011	9:44:35 AM	Bypass valve closed
5/15/2011	9:44:35 AM	Bubbler valve closed
5/15/2011	9:44:35 AM	Helium MFC set to  0.000000
5/15/2011	9:44:35 AM	H2 MFC set to  0.000000
5/15/2011	9:44:35 AM	BCl3 MFC set to  0.000000
5/15/2011	9:44:35 AM	PHl3 MFC set to  0.000000
5/15/2011	9:44:35 AM	SiCl4 MFC set to  0.000000
5/15/2011	9:44:35 AM	Bypass solenoid MFC set to  0.000000
5/15/2011	9:44:35 AM	Tube furnace set to 0
5/15/2011	9:44:35 AM	Run finished at 9:44 AM
5/15/2011	9:44:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
